Invention Grant
- Patent Title: Method for producing a mask and the mask
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Application No.: US15104931Application Date: 2015-08-11
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Publication No.: US09946151B2Publication Date: 2018-04-17
- Inventor: Xiaolei Zhang , Seiji Fujino , Xiaohu Wang
- Applicant: BOE Technology Group Co., Ltd.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Westman, Champlin & Koehler, P.A.
- Priority: CN201510184143 20150417
- International Application: PCT/CN2015/086655 WO 20150811
- International Announcement: WO2016/165247 WO 20161020
- Main IPC: G03F1/50
- IPC: G03F1/50 ; G03F1/24 ; G03F1/42

Abstract:
Embodiments of the present disclosure provide a method for producing a mask and a mask obtained by this method. The mask is configured to shield light during an exposure of a product. The method includes steps of: producing a composite membrane, wherein the composite membrane includes a first protection layer, a bonding layer, a shielding layer and a second protection layer stacked in sequence; only cutting the first protection layer, the bonding layer and the shielding layer of the composite membrane, wherein a cutting line corresponds to a shape of an area to be exposed of the product; removing the first protection layer and cut portions of the bonding layer and the shielding layer which have a same shape as that of the area to be exposed; attaching the formed composite membrane onto a base substrate of an open mask, and removing the second protection layer.
Public/Granted literature
- US20170139315A1 METHOD FOR PRODUCING A MASK AND THE MASK Public/Granted day:2017-05-18
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