Invention Grant
- Patent Title: Extreme ultraviolet lithography photomasks
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Application No.: US15139994Application Date: 2016-04-27
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Publication No.: US09946152B2Publication Date: 2018-04-17
- Inventor: Zhengqing John Qi , Christina A. Turley , Jed H. Rankin
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- Agent Michael LeStrange; Andrew M. Calderon
- Main IPC: G03F1/24
- IPC: G03F1/24 ; G03F1/22

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to modified surfaces of extreme ultraviolet lithography photomasks and methods of manufacture. The structure includes a reflective surface having a patterned design, and a black border region at edges of the patterned design. The black border region includes a modified surface morphology to direct light away from reaching a subsequent mirror.
Public/Granted literature
- US20170315438A1 EXTREME ULTRAVIOLET LITHOGRAPHY PHOTOMASKS Public/Granted day:2017-11-02
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