Invention Grant
- Patent Title: Thin film transistor and method of fabricating the same
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Application No.: US14729381Application Date: 2015-06-03
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Publication No.: US09947771B2Publication Date: 2018-04-17
- Inventor: Byoung-Keon Park
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2004-0049823 20040629
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/49 ; H01L27/12 ; H01L21/02 ; H01L21/311 ; H01L29/423 ; H01L29/51 ; H01L27/32

Abstract:
A method of fabricating a thin film transistor includes forming a substrate having first and second regions, a semiconductor layer pattern formed in the first region and the second region, and a first gate insulating layer pattern formed on a channel region of the semiconductor layer pattern of the first region. A second gate insulating layer is formed on the substrate, a first conductive layer pattern is formed above the channel region of the first region and above the semiconductor layer pattern of the second region, and an inter-layer insulating layer is formed on the substrate. A second conductive layer pattern is formed in the first region and above the first conductive layer pattern of the second region. The second conductive layer pattern of the first region is coupled to the semiconductor layer pattern of the first region through the second gate insulating layer and the inter-layer insulating layer.
Public/Granted literature
- US20150263135A1 THIN FILM TRANSISTOR AND METHOD OF FABRICATING THE SAME Public/Granted day:2015-09-17
Information query
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