- 专利标题: CMP porous pad with particles in a polymeric matrix
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申请号: US12761016申请日: 2010-04-15
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公开(公告)号: US09951054B2公开(公告)日: 2018-04-24
- 发明人: Shoutian Li , Robert Vacassy , Jaishankar Kasthuri
- 申请人: Shoutian Li , Robert Vacassy , Jaishankar Kasthuri
- 申请人地址: US IL Aurora
- 专利权人: Cabot Microelectronics Corporation
- 当前专利权人: Cabot Microelectronics Corporation
- 当前专利权人地址: US IL Aurora
- 代理商 Thomas Omholt; Erika S. Wilson
- 主分类号: B24B1/00
- IPC分类号: B24B1/00 ; B24D3/32 ; C09K3/14 ; C07D413/04 ; C07D235/06 ; C07D403/04 ; C07D403/14 ; C07D405/14 ; C07D413/14 ; C07D417/14 ; C07D471/04
摘要:
The invention provides a chemical-mechanical polishing pad comprising a polymeric matrix and 0.1-15 wt. % of metal oxide particles. The polymeric matrix has pores, the metal oxide particles are uniformly distributed throughout the pores, and the metal oxide particles have a specific surface area of about 25 m2/g to about 450 m2/g. The invention further provides a method of polishing a substrate with the polishing pad.
公开/授权文献
- US20100273399A1 CMP POROUS PAD WITH PARTICLES IN A POLYMERIC MATRIX 公开/授权日:2010-10-28
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