- 专利标题: Methods for manufacturing magnetic memory devices
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申请号: US15588776申请日: 2017-05-08
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公开(公告)号: US09954164B2公开(公告)日: 2018-04-24
- 发明人: Daeeun Jeong , Yoonjong Song
- 申请人: Daeeun Jeong , Yoonjong Song
- 申请人地址: KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Ward and Smith, P.A.
- 优先权: KR10-2016-0081655 20160629
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L43/12 ; H01L43/08
摘要:
Disclosed is a method for manufacturing a magnetic memory device. The method for manufacturing a magnetic memory device comprises sequentially forming a first magnetic layer, a tunnel barrier layer, and a second magnetic layer on a substrate, forming a boron absorption layer on the second magnetic layer, sequentially forming a metal capping layer and an oxygen donor layer on the boron absorption layer, and performing a heat treatment process to diffuse at least a portion of oxygen atoms included in the oxygen donor layer into the metal capping layer and the boron absorption layer. The metal capping layer has a greater oxygen diffusivity than the oxygen donor layer.
公开/授权文献
- US20180006215A1 Methods for Manufacturing Magnetic Memory Devices 公开/授权日:2018-01-04
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