- 专利标题: Arrangement for X-Ray tomography
-
申请号: US15728252申请日: 2017-10-09
-
公开(公告)号: US09958403B1公开(公告)日: 2018-05-01
- 发明人: Pavel Stejskal , Marek Un{hacek over (c)}ovský , Tomá{hacek over (s)} Vystav{hacek over (e)}l , Alan Frank de Jong , Bart Buijsse , Pierre Bleuet
- 申请人: FEI Company
- 申请人地址: US OR Hillsboro
- 专利权人: FEI Company
- 当前专利权人: FEI Company
- 当前专利权人地址: US OR Hillsboro
- 代理机构: Klarquist Sparkman, LLP
- 优先权: EP16193273 20161011; EP16197127 20161103
- 主分类号: G01N23/00
- IPC分类号: G01N23/00 ; G01N23/04 ; G21K7/00
摘要:
A method of investigating a specimen using X-ray tomography, comprising (a) mounting the specimen to a specimen holder, (b) irradiating the specimen with a beam of X-rays along a first line of sight through the specimen, and (c) detecting a flux of X-rays transmitted through the specimen and forming a first image. Then (d) repeating the steps (b) and (c) for a series of different lines of sight through the specimen, thereby producing a corresponding series of images. The method further comprises (e) performing a mathematical reconstruction on said series of images, so as produce a tomogram of at least part of the specimen, wherein the specimen is disposed within a substantially cylindrical metallic shell with an associated cylindrical axis, the beam of X-rays is produced by directing a beam of charged particles onto a zone of said metallic shell, so as to produce a confined X-ray source at said zone, and the series of different lines of sight is achieved by rotating said shell about said cylindrical axis, thereby causing relative motion of said zone relative to the specimen.
公开/授权文献
- US20180100815A1 ARRANGEMENT FOR X-RAY TOMOGRAPHY 公开/授权日:2018-04-12
信息查询