- Patent Title: Vacuum socket and semiconductor testing system including the same
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Application No.: US15187158Application Date: 2016-06-20
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Publication No.: US09958500B2Publication Date: 2018-05-01
- Inventor: Jang-Sun Kim , Il Jin , Seungchul Lee
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Onello & Mello, LLP
- Priority: KR10-2015-0097294 20150708
- Main IPC: G01R31/00
- IPC: G01R31/00 ; G01R31/28 ; G01R1/04

Abstract:
A vacuum socket includes a lower housing including a concave portion with a first hole, the concave portion having a recessed cross section and a printed circuit board in the concave portion, wherein the printed circuit board includes a second hole coupled to the first hole and pads provided along an edge region thereof, a cover provided in the concave portion to cover the printed circuit board, and a vacuum pad inserted in the first hole, the vacuum pad having a third hole coupled to the second hole, wherein the printed circuit board is electrically connected to a first semiconductor chip loaded between the printed circuit board and the cover, via the pads.
Public/Granted literature
- US20170010324A1 VACUUM SOCKET AND SEMICONDUCTOR TESTING SYSTEM INCLUDING THE SAME Public/Granted day:2017-01-12
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