Invention Grant
- Patent Title: Non-ambipolar plasma enhanced DC/VHF phasor
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Application No.: US15619967Application Date: 2017-06-12
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Publication No.: US09966239B2Publication Date: 2018-05-08
- Inventor: Lee Chen , Zhiying Chen
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Rothwell, Figg, Ernst & Manbeck, P.C.
- Main IPC: H01L21/302
- IPC: H01L21/302 ; H01J37/32 ; H01L21/67 ; H01L21/3065

Abstract:
This disclosure relates to a plasma processing system for controlling plasma density across a substrate and maintaining a tight ion energy distribution within the plasma. In one embodiment, this may include using a dual plasma chamber system including a non-ambipolar plasma chamber and a DC plasma chamber adjacent to the non-ambipolar system. The DC plasma chamber provide power to generate the plasma by rotating the incoming power between four inputs from a VHF power source. In one instance, the power to each of the four inputs are at least 90 degrees out of phase from each other.
Public/Granted literature
- US20170278684A1 NON-AMBIPOLAR PLASMA EHNCANCED DC/VHF PHASOR Public/Granted day:2017-09-28
Information query
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