Invention Grant
- Patent Title: Carbon nanofibers with sharp tip ends and a carbon nanofibers growth method using a palladium catalyst
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Application No.: US14808683Application Date: 2015-07-24
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Publication No.: US09970130B2Publication Date: 2018-05-15
- Inventor: JungHo Kang , Myung Jong Kim , Dong Su Lee
- Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
- Applicant Address: KR Seoul
- Assignee: Korea Institute of Science and Technology
- Current Assignee: Korea Institute of Science and Technology
- Current Assignee Address: KR Seoul
- Agency: Greer Burns & Crain Ltd.
- Priority: KR10-2014-0136903 20141010
- Main IPC: D01F9/127
- IPC: D01F9/127

Abstract:
The present invention relates to a carbon nanofibers growth method including (S1) depositing an alumina layer on a silicon substrate, (S2) depositing palladium on the alumina layer to form a palladium catalyst layer, and (S3) growing carbon nanofibers on the palladium catalyst layer by a chemical vapor deposition (CVD) method, and carbon nanofibers vertically grown on an alumina layer-deposited silicon substrate, the carbon nanofibers having tip ends with a radius of curvature less than or equal to 5 nm, a diameter less than or equal to 50 nm, a length more than or equal to 1 mm, and a length-diameter aspect ratio more than or equal to 50,000.
Public/Granted literature
- US20160102420A1 CARBON NANOFIBERS WITH SHARP TIP ENDS AND A CARBON NANOFIBERS GROWTH METHOD USING A PALLADIUM CATALYST Public/Granted day:2016-04-14
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