公开(公告)号：US09970130B2

公开(公告)日：2018-05-15

申请号：US14808683

申请日：2015-07-24

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： JungHo Kang ,  Myung Jong Kim ,  Dong Su Lee

IPC: D01F9/127

CPC classification number: D01F9/127

Abstract: The present invention relates to a carbon nanofibers growth method including (S1) depositing an alumina layer on a silicon substrate, (S2) depositing palladium on the alumina layer to form a palladium catalyst layer, and (S3) growing carbon nanofibers on the palladium catalyst layer by a chemical vapor deposition (CVD) method, and carbon nanofibers vertically grown on an alumina layer-deposited silicon substrate, the carbon nanofibers having tip ends with a radius of curvature less than or equal to 5 nm, a diameter less than or equal to 50 nm, a length more than or equal to 1 mm, and a length-diameter aspect ratio more than or equal to 50,000.