Invention Grant
- Patent Title: Method for inspecting magnetron
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Application No.: US14886425Application Date: 2015-10-19
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Publication No.: US09977070B2Publication Date: 2018-05-22
- Inventor: Kazushi Kaneko , Hideo Kato , Kazunori Funazaki , Eiji Takahashi
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JP2014-214350 20141021; JP2015-154248 20150804
- Main IPC: G01R31/25
- IPC: G01R31/25 ; H01J37/32 ; H01J37/34

Abstract:
A magnetron can be inspected with high accuracy. A life of the magnetron is determined on the basis of a comparison between a current parameter, which indicates a current status of the magnetron and is obtained from the one or more measurement values for specifying a current status of the magnetron at a time point when a time period having a predetermined duration or more has elapsed after generation of a high frequency power by the magnetron is started, and a difference between a power of a progressive wave and a set power is equal to or lower than a first predetermined value and a power of a reflection wave is equal to or lower than a second predetermined value, and an initial parameter, which indicates an initial status of the magnetron and corresponds to the current parameter.
Public/Granted literature
- US20160109502A1 METHOD FOR INSPECTING MAGNETRON Public/Granted day:2016-04-21
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