Invention Grant
- Patent Title: Sensor capable of sensing pressure by means of the deformation of a wrinkled piezoelectric layer
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Application No.: US15028640Application Date: 2014-10-16
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Publication No.: US09981420B2Publication Date: 2018-05-29
- Inventor: Lamine Benaissa , Jean-Sebastien Moulet
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1360110 20131017
- International Application: PCT/EP2014/072266 WO 20141016
- International Announcement: WO2015/055788 WO 20150423
- Main IPC: G01L1/16
- IPC: G01L1/16 ; B29C61/00 ; H01L41/113 ; B82B3/00 ; B32B3/28 ; B32B3/30 ; C03B23/02 ; B28B17/00 ; H01L21/302 ; H01L21/3105 ; B29K105/00
Abstract:
A pressure-sensitive sensor including a substrate supporting a piezoelectric layer of a piezoelectric material. The piezoelectric layer includes surface undulations as wrinkles on which pressure is exerted upon use of the sensor. The piezoelectric layer is sandwiched between two electrodes for collecting charges generated by deformation of the piezoelectric layer.
Public/Granted literature
- US20160252411A1 SENSOR CAPABLE OF SENSING PRESSURE BY MEANS OF THE DEFORMATION OF A WRINKLED PIEZOELECTRIC LAYER Public/Granted day:2016-09-01
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