Invention Grant
- Patent Title: Hafnium or zirconium oxide coating
-
Application No.: US14744138Application Date: 2015-06-19
-
Publication No.: US09983333B2Publication Date: 2018-05-29
- Inventor: Michael Scherer
- Applicant: LEYBOLD OPTICS GMBH
- Applicant Address: DE Alzenau
- Assignee: Leybold Optics GmbH
- Current Assignee: Leybold Optics GmbH
- Current Assignee Address: DE Alzenau
- Agency: WRB-IP LLP
- Main IPC: C09D1/00
- IPC: C09D1/00 ; G02B1/115 ; C04B35/48 ; C04B35/622 ; C23C14/08 ; C23C14/35

Abstract:
The invention concerns an optical coating (3, 3′), having a high refractive index and good optical properties (i.e., low absorption and scatter) and limited internal stresses in a spectral range extending from the visible to the near UV range (i.e., up to a wavelength of 220 nm). The coating (3, 3′) according to the invention consists of a hafnium- or zirconium-containing oxide HfxSiyOz or ZrxSiyOz containing an silicon fraction (y) between 1 at. % and 10 at. %, especially between 1.5 at. % and 3 at. %.
Public/Granted literature
- US20150285957A1 Hafnium or Zirconium Oxide Coating Public/Granted day:2015-10-08
Information query
IPC分类: