Invention Grant
- Patent Title: Scanning microscope having focal position adjustment unit which includes a deflecting element
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Application No.: US14543394Application Date: 2014-11-17
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Publication No.: US09983396B2Publication Date: 2018-05-29
- Inventor: Shingo Tamano
- Applicant: OLYMPUS CORPORATION
- Applicant Address: JP Tokyo
- Assignee: OLYMPUS CORPORATION
- Current Assignee: OLYMPUS CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Holtz, Holtz & Volek PC
- Priority: JP2013-251283 20131204
- Main IPC: G02B21/00
- IPC: G02B21/00 ; G02B21/02 ; G02B21/24 ; G02B21/36

Abstract:
A scanning microscope includes a collecting lens that takes in a detection light, a focal position adjustment unit that moves in an optical axis direction of the collecting lens to make the collecting lens move in the optical axis direction, a detector positioned at a location that is optically conjugate to a pupil of the collecting lens, and a relay optical system that relays the pupil to the detector. The relay optical system includes a first optical element with a positive power, the first optical element being positioned in the focal position adjustment unit and converting the detection light that was converted by the collecting lens into a parallel light flux, into a convergent light flux to be emitted outside of the focal position adjustment unit, and a second optical element that is positioned outside of the focal position adjustment unit and between the detector and the first optical element.
Public/Granted literature
- US20150153554A1 SCANNING MICROSCOPE Public/Granted day:2015-06-04
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