- 专利标题: Photomask and method for fabricating integrated circuit
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申请号: US15436729申请日: 2017-02-17
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公开(公告)号: US09983473B2公开(公告)日: 2018-05-29
- 发明人: Chun-Yu Lin , Yi-Jie Chen , Feng-Yuan Chiu , Ying-Chou Cheng , Kuei-Liang Lu , Ya-Hui Chang , Ru-Gun Liu , Tsai-Sheng Gau
- 申请人: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- 申请人地址: TW Hsinchu
- 专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- 当前专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Maschoff Brennan
- 主分类号: G03F1/36
- IPC分类号: G03F1/36 ; G03F1/42 ; G03F7/038 ; G06F17/50
摘要:
A photomask and method for fabricating an integrated circuit is provided. A design layout is provided, wherein the design layout has a plurality of main features. A plurality of assistant features are added in an assistant region of the design layout to form a first layout, wherein the assistant region has no main feature and a width of the assistant region is larger than five times of a width of the main feature. A plurality of optical proximity correction (OPC) features are added on the first layout to form a second layout. And a photomask is formed according to the second layout.
公开/授权文献
- US20170160633A1 PHOTOMASK AND METHOD FOR FABRICATING INTEGRATED CIRCUIT 公开/授权日:2017-06-08
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