Invention Grant
- Patent Title: FinFETs with non-merged epitaxial S/D extensions having a SiGe seed layer on insulator
-
Application No.: US15292768Application Date: 2016-10-13
-
Publication No.: US09991258B2Publication Date: 2018-06-05
- Inventor: Hong He , Shogo Mochizuki , Chiahsun Tseng , Chun-Chen Yeh , Yunpeng Yin
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION , Renesas Electronics Corporation
- Applicant Address: US NY Armonk JP Kanagawa
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION,RENESAS ELECTRONICS CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION,RENESAS ELECTRONICS CORPORATION
- Current Assignee Address: US NY Armonk JP Kanagawa
- Agency: Tutunjian & Bitetto, P.C.
- Agent Vazken Alexanian
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/04 ; H01L29/08 ; H01L27/088 ; H01L29/66 ; H01L29/78 ; H01L21/02 ; H01L21/306 ; H01L21/8234

Abstract:
Semiconductor devices include multiple fins formed in trenches in an insulator layer. Each of the plurality of fins has a uniform crystal orientation and a fin cap in a source and drain region that extends vertically and laterally beyond the trench. The fin caps of the respective fins are separate from one another. A gate structure is formed over the fins that leaves the source and drain regions exposed. The insulator layer at least partially covers a sidewall of the gate structure.
Public/Granted literature
- US20170033104A1 NON-MERGED EPITAXIALLY GROWN MOSFET DEVICES Public/Granted day:2017-02-02
Information query
IPC分类: