Invention Grant
- Patent Title: Voidless contact metal structures
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Application No.: US15270808Application Date: 2016-09-20
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Publication No.: US09997407B2Publication Date: 2018-06-12
- Inventor: Veeraraghavan S. Basker , Nicolas L. Breil , Oleg Gluschenkov , Shogo Mochizuki , Alexander Reznicek
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Daniel P. Morris, Esq.
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L23/528 ; H01L23/522

Abstract:
Voidless contact metal structures are provided. In one embodiment, a voidless contact metal structure is provided by first providing a first contact metal that contains a void within a contact opening. The void is then opened to provide a divot in the first contact metal. After forming a dielectric spacer atop a portion of first contact metal, a second contact metal is then formed that lacks any void. The second contact metal fills the entirety of the divot within the first contact metal. In another embodiment, two diffusion barrier structures are provided within a contact opening, followed by the formation of a contact metal structure that lacks any void.
Public/Granted literature
- US20170170064A1 VOIDLESS CONTACT METAL STRUCTURES Public/Granted day:2017-06-15
Information query
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