- 专利标题: Semiconductor wafer and method of concurrently testing circuits formed thereon
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申请号: US14289618申请日: 2014-05-28
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公开(公告)号: US09997423B2公开(公告)日: 2018-06-12
- 发明人: Dewey Killingsworth
- 申请人: FREESCALE SEMICONDUCTOR, INC.
- 申请人地址: US TX Austin
- 专利权人: NXP USA, INC.
- 当前专利权人: NXP USA, INC.
- 当前专利权人地址: US TX Austin
- 代理商 Charles E. Bergere
- 主分类号: G01R31/20
- IPC分类号: G01R31/20 ; H01L21/66 ; G01R31/26
摘要:
A semiconductor wafer has an array of integrated circuit dies formed on it. Each die is enclosed by a respective seal ring. Each die has a group of bond pads and test pads coupled to the bond pads. A test pad region is formed on the wafer. The test pad region has probe pads and common electrical interconnects that selectively electrically couple each of the probe pads to a bond pad on each of the dies. The common electrical interconnects in the test pad region reduce the possibility of probe damage to the integrated circuits and allow the dies to be tested concurrently before being cut from the wafer.
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