- 专利标题: Vertical memory devices
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申请号: US15155732申请日: 2016-05-16
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公开(公告)号: US09997534B2公开(公告)日: 2018-06-12
- 发明人: Yong-Hoon Son , Kyung-Hyun Kim , Byeong-Ju Kim , Phil-Ouk Nam , Kwang Chul Park , Yeon-Sil Sohn , Jin-I Lee , Jong-Heun Lim , Won-Bong Jung , Kohji Kanamori
- 申请人: Yong-Hoon Son , Kyung-Hyun Kim , Byeong-Ju Kim , Phil-Ouk Nam , Kwang Chul Park , Yeon-Sil Sohn , Jin-I Lee , Jong-Heun Lim , Won-Bong Jung , Kohji Kanamori
- 申请人地址: KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Myers Bigel, P.A.
- 优先权: KR10-2015-0069447 20150519
- 主分类号: H01L29/792
- IPC分类号: H01L29/792 ; H01L27/11582 ; H01L23/528
摘要:
A vertical memory device includes a substrate, a channel on the substrate, extending in a vertical direction with respect to a top surface of the substrate, and including a protrusion at a lower portion of the channel, the protrusion extending in a parallel direction with respect to the top surface of the substrate, a semiconductor pattern connecting the protrusion and the substrate, and gate lines stacked and spaced apart from each other in the vertical direction, the gate lines on the protrusion and the semiconductor pattern and surrounding the channel.
公开/授权文献
- US20160343730A1 Vertical Memory Devices 公开/授权日:2016-11-24
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