外观设计
- 专利标题: Dome assembly for a deposition chamber
- 专利标题(中): 用于沉积室的圆顶组件
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申请号: US29350406申请日: 2009-11-16
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公开(公告)号: USD664172S1公开(公告)日: 2012-07-24
- 设计人: Tetsuya Ishikawa , David H. Quach , Anzhong Chang , Olga Kryliouk , Yuriy Melnik , Harsukhdeep S. Ratia , Son T. Nguyen , Lily Pang
- 申请人: Tetsuya Ishikawa , David H. Quach , Anzhong Chang , Olga Kryliouk , Yuriy Melnik , Harsukhdeep S. Ratia , Son T. Nguyen , Lily Pang
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Patterson & Sheridan, LLP
- LOC分类号: 15-99