再颁专利
USRE38437E1 Method and apparatus for an integrated laser beam scanner using a carrier substrate
有权
使用载体衬底的集成激光束扫描器的方法和装置
- 专利标题： Method and apparatus for an integrated laser beam scanner using a carrier substrate
- 专利标题（中）： 使用载体衬底的集成激光束扫描器的方法和装置
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申请号： US10022917申请日： 2001-12-20
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公开(公告)号： USRE38437E1公开(公告)日： 2004-02-24
- 发明人: Philip D. Floyd , Decai Sun , Joel A. Kubby
- 申请人： Philip D. Floyd , Decai Sun , Joel A. Kubby
- 主分类号： G02B2608
- IPC分类号： G02B2608
摘要：
An solid state scanning system having a single crystal silicon deflection mirror and scanning mirror is integrated with a light source. Separation of the micro-electro-mechanical systems and light emitters on separate substrates allows the use of flip-chip and solder bump bonding techniques for mounting of the light sources. The separate substrates are subsequently full wafer bonded together to create an integrated solid state scanning system.
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