Invention Application
WO1994008442A1 FABRICATION OF DENSE PARALLEL SOLDER BUMP CONNECTIONS 审中-公开
DENSE并行焊接BUMP连接的制造

FABRICATION OF DENSE PARALLEL SOLDER BUMP CONNECTIONS
Abstract:
A method and product are disclosed in which multiple solder bumps (76) on a first planar surface (66) are guided into engagement with terminals (76) on a second planar surface (72) by means of holes (80) formed (by a photolithographic process) in a dielectric layer (78), which has been added to the second surface (72) to provide the holes (80) (or sockets) through which the solder bumps (76) (or plugs) extend. The perforated (hole-providing) layer may be formed of one of several materials. The preferred perforated layer material is a photo-definable polyamide, which is hardened by heating after the holes have been formed. Small solder bumps (84) may be formed inside the holes (80) on the second surface (72), in order to facilitate bonding between the solder bumps (76) on the first surface (66) and the terminals (70) on the second surface (72).
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