Invention Application
WO1996030938A2 PROCESS FOR FABRICATING LAYERED SUPERLATTICE MATERIALS AND MAKING ELECTRONIC DEVICES INCLUDING SAME
审中-公开
制造层状超导材料和制造包括其的电子器件的方法
- Patent Title: PROCESS FOR FABRICATING LAYERED SUPERLATTICE MATERIALS AND MAKING ELECTRONIC DEVICES INCLUDING SAME
- Patent Title (中): 制造层状超导材料和制造包括其的电子器件的方法
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Application No.: PCT/US1996003367Application Date: 1996-03-12
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Publication No.: WO1996030938A2Publication Date: 1996-10-03
- Inventor: SYMETRIX CORPORATION , OLYMPUS OPTICAL CO., LTD. , YOSHIMORI, Hiroyuki , PAZ DE ARAUJO, Carlos, A. , ITO, Takeshi , SCOTT, Michael, C. , MCMILLAN, Larry, D.
- Applicant: SYMETRIX CORPORATION , OLYMPUS OPTICAL CO., LTD.
- Assignee: SYMETRIX CORPORATION,OLYMPUS OPTICAL CO., LTD.
- Current Assignee: SYMETRIX CORPORATION,OLYMPUS OPTICAL CO., LTD.
- Priority: US8/405,953 19950317
- Main IPC: H01L21/3205
- IPC: H01L21/3205
Abstract:
A liquid precursor containing a metal is applied to a substrate, RTP baked, and annealed to form a layered superlattice material. Special polyoxyalkylated precursor solutions are designed to optimize polarizability of the corresponding metal oxide materials by adding dopants including stoichiometric excess amounts of bismuth and tantalum. The RTP baking process is especially beneficial in optimizing the polarizability of the resultant metal oxide.
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