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Invention Application
WO99046605A1 MEASURING DEVICE WITH A MICROSENSOR AND METHOD FOR PRODUCING THE SAME 审中-公开
测量装置与微传感器及其制造方法

  • Patent Title: MEASURING DEVICE WITH A MICROSENSOR AND METHOD FOR PRODUCING THE SAME
  • Patent Title (English): Measuring device with a microsensor and method for producing the same
  • Patent Title (中): 测量装置与微传感器及其制造方法
  • Application No.: PCT/DE1999/000268
    Application Date: 1999-02-01
  • Publication No.: WO99046605A1
    Publication Date: 1999-09-16
  • Main IPC: G01D3/028
  • IPC: G01D3/028 ;  G01F1/684 ;  G01F1/688 ;  G01L9/00 ;  G01L11/00 ;  G01L21/10 ;  G01P15/00 ;  G01P15/08 ;  G01P15/12
MEASURING DEVICE WITH A MICROSENSOR AND METHOD FOR PRODUCING THE SAME
Abstract:
The invention relates to a measuring device with at least one microsensor (5). The at least one microsensor has at least two chambers (20, 30) which are filled with a gas. Said chambers (20, 30) are interconnected by at least one channel (40) and are sealed off in such a way that they are outwardly gas-tight. A detection device (70) for detecting a gas stream flowing through the at least one channel (40) is provided, said gas stream being caused by different pressures being present in the chambers. The invention also relates to a method for producing an inventive microsensor.
Abstract(Chinese):

本发明涉及一种测量装置与至少一个微传感器（5），其中测量设备下式成立：所述至少一个微传感器具有至少两个填充有气体腔室（20，30）; 腔室（20，30）由至少一个通道（40）相互连接; 腔室（20，30）是气密地在外面完成的其余部分; 并且提供了用于检测所述至少一个通道（40）的气体流，其气流来由于在腔室的各种通行的压力在中流动的电流的检测装置（70）。 此外，本发明涉及一种用于发明微型的制备方法。

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