发明申请
- 专利标题: SYSTEM AND METHOD FOR DEPOSITION OF COATINGS ON A SUBSTRATE
- 专利标题(中): 在基材上沉积涂层的系统和方法
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申请号: PCT/RU0100027申请日: 2001-01-25
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公开(公告)号: WO0155475A2公开(公告)日: 2001-08-02
- 发明人: DODONOV ALEXANDR IGOREVICH , DIAMANT VALERY , BASHKOV VALERY MIKHAILOVICH
- 申请人: V I P VACUUM ION PLASMA TECHNO , DODONOV ALEXANDR IGOREVICH , DIAMANT VALERY , BASHKOV VALERY MIKHAILOVICH
- 专利权人: V I P VACUUM ION PLASMA TECHNO,DODONOV ALEXANDR IGOREVICH,DIAMANT VALERY,BASHKOV VALERY MIKHAILOVICH
- 当前专利权人: V I P VACUUM ION PLASMA TECHNO,DODONOV ALEXANDR IGOREVICH,DIAMANT VALERY,BASHKOV VALERY MIKHAILOVICH
- 优先权: IL13425500 2000-01-27
- 主分类号: C23C14/02
- IPC分类号: C23C14/02 ; C23C14/32 ; H01J37/317 ; H01J37/34 ; C23C14/22 ; H01J37/32
摘要:
The present invention relates to a system (1) and method for deposition of coatings on a substrate (10). More particularly, the invention concerns a system and method for low-temperature deposition of corrosion-proof, wear-resistant ion-plasma coatings. A system for deposition of an ion plasma coating on a substrate, said system comprising: a housing (2) defining a vacuum chamber and having access means for the introduction and retrieval of a substrate (10) to be coated; a plasma vacuum deposition (PVD) source (8) communicating with the interior of said housing; an electrically conductive support (12) on which said substrate is placed; a gas ion-plasma source (14) cathode assembly communicating with said chamber in spaced-apart relationship to said support; a first power supply (20') electrically connected to said support; a second power supply (20'') electrically connected to said cathode assembly, and a third power supply (20''') of additional discharge electrically connectable to said cathode assembly, wherein said power supplies are operative to effect pulsed discharge on said gas ion-plasma source cathode assembly or pulsed accelerating voltage on said support.
IPC分类: