Invention Application
- Patent Title: AXIAL GRADIENT TRANSPORT APPARATUS AND PROCESS FOR PRODUCING LARGE SIZE, SINGLE CRYSTALS OF SILICON CARBIDE
- Patent Title (中): 轴向梯度运输装置和生产大尺寸碳化硅单晶的工艺
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Application No.: PCT/US0107966Application Date: 2001-03-13
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Publication No.: WO0168954A2Publication Date: 2001-09-20
- Inventor: SNYDER DAVID W , EVERSON WILLIAM J
- Applicant: II VI INC , SNYDER DAVID W , EVERSON WILLIAM J
- Assignee: II VI INC,SNYDER DAVID W,EVERSON WILLIAM J
- Current Assignee: II VI INC,SNYDER DAVID W,EVERSON WILLIAM J
- Priority: US18879300 2000-03-13
- Main IPC: C30B23/06
- IPC: C30B23/06 ; C30B23/00 ; C30B25/22 ; C30B29/36 ; C30B35/00 ; H01L21/203 ; C30B
Abstract:
Disclosed is an apparatus and a method for growing single crystals of materials such as silicon carbide through axial gradient transport. A source of the material (10) is placed at one end of a reaction chamber (2) opposite a seed crystal (13). Separate heating elements (16 and 60; 20 and 62) are positioned at opposite ends of the reaction chamber. The reaction chamber (2) is placed in a pressurized growth chamber (26). By appropriately controlling the pressure in the growth chamber (26) and the temperature of the heating elements (16, 20), including the temperature differential therebetween, a uniaxial temperature gradient is generated in the reaction chamber (2). In this manner, substantially planar isotherms are generated and a high quality crystal can be grown through a physical vapor transport process.
Information query
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