Invention Application
- Patent Title: BASE-PAD FOR A POLISHING PAD
- Patent Title (中): 抛光垫底座
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Application No.: PCT/US0120890Application Date: 2001-06-29
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Publication No.: WO0202274A3Publication Date: 2002-04-11
- Inventor: SCOTT DIANE B , BAKER ARTHUR RICHARD III , ZHANG TAO
- Applicant: RODEL INC
- Assignee: RODEL INC
- Current Assignee: RODEL INC
- Priority: US21522900 2000-06-30
- Main IPC: B24B37/22
- IPC: B24B37/22 ; B24B37/24 ; B24D11/02 ; B24D13/12 ; B24D13/14 ; H01L21/304 ; B24B37/04
Abstract:
The invention is directed to a base-pad (2) for placement under a polishing pad (1) for use with a polishing fluid during a polishing operation, the base-pad (2) having a layer (7) with vertical elongated pores that absorb polishing fluid and that confine absorbed polishing fluid from transport laterally in the base-pad (2). Micropores in the layer (7) are impermeable to the polishing fluid and permeable to gasses.
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