Invention Application
WO0202274A3 BASE-PAD FOR A POLISHING PAD 审中-公开
抛光垫底座

BASE-PAD FOR A POLISHING PAD
Abstract:
The invention is directed to a base-pad (2) for placement under a polishing pad (1) for use with a polishing fluid during a polishing operation, the base-pad (2) having a layer (7) with vertical elongated pores that absorb polishing fluid and that confine absorbed polishing fluid from transport laterally in the base-pad (2). Micropores in the layer (7) are impermeable to the polishing fluid and permeable to gasses.
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