Invention Application
- Patent Title: PLASMA DISPLAY PANEL WITH A LOW K DIELECTRIC LAYER
- Patent Title (中): 具有低K介质层的等离子体显示面板
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Application No.: PCT/US0219559Application Date: 2002-06-18
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Publication No.: WO02103742A2Publication Date: 2002-12-27
- Inventor: LAW KAM S , SHANG QUANYUAN , TAKEHARA TAKAKO , WON TAEKYUNG , HARSHBARGER WILLIAM R , MAYDAN DAN
- Applicant: APPLIED MATERIALS INC
- Assignee: APPLIED MATERIALS INC
- Current Assignee: APPLIED MATERIALS INC
- Priority: US88617401 2001-06-18
- Main IPC: H01J9/02
- IPC: H01J9/02 ; H01J11/12 ; H01J11/38 ; H01J17/04 ; H01J17/49
Abstract:
A plasma display panel including a low k dielectric layer. In one embodiment, the dielectric layer is comprises a fluorine-doped silicon oxide layer such as an SiOF layer. In another embodiment, the dielectric layer comprises a Black Diamond layer. In certain embodiments, a capping layer such as SiN or SiON is deposited over the dielectric layer.
Information query
