公开(公告)号：WO2008013839A3

公开(公告)日：2008-10-23

申请号：PCT/US2007016700

申请日：2007-07-25

Applicant: APPLIED MATERIALS INC ,  SHANG QUANYUAN ,  SZE FAN CHEUNG ,  HOOG JOSEF ,  SUN LIZHONG ,  WHITE JOHN M

Inventor： SHANG QUANYUAN ,  SZE FAN CHEUNG ,  HOOG JOSEF ,  SUN LIZHONG ,  WHITE JOHN M

IPC: B41J2/165 ,  B41J2/215

CPC classification number: B41J2/16552 ,  B41J29/17

Abstract: The invention provides an ink jet printing apparatus (1000) that includes at least one ink jet print head (1002) adapted to dispense flu onto a substrate (S) and at least one delivery aperture (1006a or 1006b) adapted to direct a gas (from a gas supply 1010) toward the substrate. The apparatus may also include at least one recovery aperture (1008a or 1008b) adapted to draw materials away from the substrate and evaporate liquids from the surface of the substrate.

Abstract translation: 本发明提供了一种喷墨打印设备（1000），其包括适于将流感分配到基底（S）上的至少一个喷墨打印头（1002）和至少一个适于引导气体的输送孔（1006a或1006b） 从气体供给部1010）朝向基板。 该装置还可以包括至少一个适于将材料从衬底拉出并从衬底的表面蒸发液体的回收孔（1008a或1008b）。

公开(公告)号：WO2007040970A3

公开(公告)日：2007-10-11

申请号：PCT/US2006036297

申请日：2006-09-15

Applicant: APPLIED MATERIALS INC

Inventor： SHANG QUANYUAN ,  KURITA SHINICHI ,  SZE FAN CHEUNG

IPC: B41J2/165 ,  B41J15/16

CPC classification number: B41J2/16535 ,  B41J2/16526

Abstract: Methods and apparatus for cleaning a nozzle plate of an inkjet print head are provided. A first method includes positioning a cleaning medium proximate the inkjet print head, determining a pressure for a pressure roller to apply against the cleaning medium, contacting the cleaning medium with the pressure roller with the determined pressure, and moving the cleaning medium relative to the inkjet print head so as to clean the inkjet print head. The method also includes purging ink from the inkjet print head prior to the pressure roller contacting the cleaning medium and pre- jetting ink from the inkjet print head after moving the cleaning medium. Numerous other aspects are t provided.

Abstract translation: 提供了用于清洁喷墨打印头的喷嘴板的方法和装置。 第一种方法包括将清洁介质定位在喷墨打印头附近，确定压力辊施加在清洁介质上的压力，使清洁介质与压力辊接触确定的压力，并相对于喷墨打印机移动清洁介质 打印头以清洁喷墨打印头。 该方法还包括在加压辊接触清洁介质之前从喷墨打印头清洗墨水，并在移动清洁介质之后从喷墨打印头预先喷射墨水。 提供了许多其他方面。

公开(公告)号：WO2004112104A3

公开(公告)日：2005-03-17

申请号：PCT/US2004017236

申请日：2004-06-01

Applicant: APPLIED MATERIALS INC ,  HSIAO MARK ,  YIM DONG-KIL ,  TAKEHARA TAKAKO ,  SHANG QUANYUAN ,  HARSHBARGER WILLIAM R ,  KIM WOONG-KWON ,  YUN DUK-CHUL ,  CHANG YOU-GYUNG

Inventor： HSIAO MARK ,  YIM DONG-KIL ,  TAKEHARA TAKAKO ,  SHANG QUANYUAN ,  HARSHBARGER WILLIAM R ,  KIM WOONG-KWON ,  YUN DUK-CHUL ,  CHANG YOU-GYUNG

IPC: H01L21/336 ,  H01L29/49 ,  H01L29/786

CPC classification number: H01L29/66765 ,  H01L29/4908 ,  H01L29/78669 ,  H01L29/78678

Abstract: Method of fabricating a thin-film transistor (TFT) in which a gate metal is deposited onto a substrate in order to form the gate of the thin-film transistor. The substrate may be an insulative substrate or a color filter. In a first method, the gate metal is subjected to an H2 plasma. After subjecting the gate metal to an H2 plasma, the gate insulating film is deposited onto the gate. In a second method, first and second layers of gate insulating film are respectively deposited on the gate at a first and second deposition rates. One layer is deposited under H2 or argon dilution conditions and has improved insulating conditions while the other layer serves to lower the overall compressive stress of the dual layer gate insulator. In a third method, an n silicon film is formed on a substrate by maintaining a flow of silane, phosphine and hydrogen gas into a processing chamber at substrate temperatures of about 300 °C or less.

Abstract translation: 制造薄膜晶体管（TFT）的方法，其中栅极金属沉积到衬底上以形成薄膜晶体管的栅极。 衬底可以是绝缘衬底或滤色器。 在第一种方法中，栅极金属经受H 2等离子体。 在使栅极金属进入H 2等离子体之后，栅极绝缘膜沉积在栅极上。 在第二种方法中，第一和第二栅极绝缘膜层分别以第一和第二沉积速率沉积在栅极上。 在H2或氩稀释条件下沉积一层，并且具有改善的绝缘条件，而另一层用于降低双层栅极绝缘体的总体压应力。 在第三种方法中，通过在约300℃或更低的衬底温度下保持硅烷，膦和氢气流入处理室，在衬底上形成n +硅膜。

公开(公告)号：WO2006078702A3

公开(公告)日：2009-04-09

申请号：PCT/US2006001716

申请日：2006-01-18

Applicant: APPLIED MATERIALS INC ,  SZE FAN CHEUNG ,  SHANG QUANYUAN ,  WHITE JOHN M

Inventor： SZE FAN CHEUNG ,  SHANG QUANYUAN ,  WHITE JOHN M

IPC: B41J2/145 ,  A61B17/02 ,  A61B17/17 ,  A61F2/00 ,  A61F2/28 ,  A61F2/30 ,  A61F2/44 ,  A61F2/46

CPC classification number: G02F1/133516 ,  G02F1/133512

Abstract: Apparatus and methods for treating a substrate of a flat panel display are provided. An inkjet printing system that includes a chemical compound application assembly that applies chemical compound(s) on a substrate of a flat panel display through a chemical compound applicator is provided. The inkjet printing system may also include a substrate support stage, a stage positioning system, and an inkjet printing module. The chemical compound applicator may have a width that substantially spans the substrate width. A method for treating a glass substrate and a black matrix thereon for a flat panel display prior to delivery of ink to the glass substrate by an inkjet printing system is also provided. The black matrix and glass substrate are exposed to a surface active compound which may modify the surface energy of the black matrix, the surface energy of the glass substrate, or both.

Abstract translation: 提供了用于处理平板显示器的基板的设备和方法。 提供了一种喷墨打印系统，其包括通过化学复合施加器在平板显示器的基板上施加化合物的化合物施加组件。 喷墨打印系统还可以包括基板支撑台，台架定位系统和喷墨打印模块。 化合物涂布器可以具有基本跨越基底宽度的宽度。 还提供了一种用于在通过喷墨打印系统将墨水输送到玻璃基板之前用于处理平板显示器的玻璃基板和黑色矩阵的方法。 黑色矩阵和玻璃基板暴露于表面活性化合物，其可以改变黑色基体的表面能，玻璃基底的表面能或二者的表面能。

公开(公告)号：WO2004054010A3

公开(公告)日：2004-11-18

申请号：PCT/US0339385

申请日：2003-12-10

Applicant: APPLIED MATERIALS INC

Inventor： HSIAO MARK ,  TAKEHARA TAKAKO ,  SHANG QUANYUAN ,  HARSHBARGER WILLIAM R

IPC: H01L51/52 ,  H01L51/20

CPC classification number: H01L51/5253

Abstract: An organic electroluminescent device comprising an anode layer on a substrate, an organic layer on the anode layer, and a cathode layer on the organic layer. In one embodiment, the cathode layer is subjected to H2 plasma prior to deposition of a protective layer over the cathode. In another embodiment, the organic electroluminescent device is encapsulated with an inner encapsulation layer on the cathode layer, and an outer encapsulation layer on the inner encapsulation layer. The inner layer is optimized for adhesion to the cathode layer.

Abstract translation: 一种有机电致发光器件，包括衬底上的阳极层，阳极层上的有机层和有机层上的阴极层。 在一个实施例中，阴极层在阴极上沉积保护层之前经受H 2等离子体。 在另一个实施方案中，有机电致发光器件用阴极层上的内部封装层和内部封装层上的外部封装层封装。 内层针对粘附到阴极层而进行了优化。

公开(公告)号：WO2004047154A3

公开(公告)日：2004-09-10

申请号：PCT/US0337151

申请日：2003-11-18

Applicant: APPLIED MATERIALS INC

Inventor： HOU LI ,  SHANG QUANYUAN ,  GREENE ROBERT I

IPC: H01L21/687 ,  H01L21/00 ,  H01L21/67

CPC classification number: H01L21/68742 ,  H01L21/68778

Abstract: A method for lifting a substrate from a susceptor. A plurality of lift pins is configured so that they support the substrate without contacting a central portion of the substrate. The processed substrate has a first dimension that is at least 500 millimeters and a second dimension that is at least 500 millimeters. Each lift pin in the plurality of lift pins is configured so that it supports the substrate from a point that is at least 120 millimeters from a center of the substrate. The plurality of lift pins is configured so that each side of the susceptor is supported by at least three lift pins. In some embodiments, a support member overlies at least a subset of the plurality of lift pins.

Abstract translation: 一种从基座抬起基板的方法。 多个升降销构造成使得它们支撑基板而不接触基板的中央部分。 处理后的基板具有至少500毫米的第一尺寸和至少500毫米的第二尺寸。 多个升降销中的每个升降销被构造成使得它从离基板的中心至少120毫米的点支撑基板。 多个升降销构造成使得基座的每一侧由至少三个升降销支撑。 在一些实施例中，支撑构件覆盖多个升降销的至少一个子集。

公开(公告)号：WO2009076249A3

公开(公告)日：2009-08-20

申请号：PCT/US2008085775

申请日：2008-12-06

Applicant: APPLIED MATERIALS INC ,  SHANG QUANYUAN ,  WHITE JOHN M

Inventor： SHANG QUANYUAN ,  WHITE JOHN M

IPC: G02F1/13 ,  G01N21/88 ,  G02F1/1335

CPC classification number: G01N21/95 ,  G01N2021/9513

Abstract: Systems and methods for measuring deposited ink in a substrate are provided. The invention includes a light source adapted to transmit light through a deposited ink on a substrate, and a camera having a CCD sensor array wherein the camera is adapted to measure the amount of light that is transmitted through the deposited ink. Numerous other aspects are provided.

Abstract translation: 提供了用于测量基底中的沉积墨水的系统和方法。 本发明包括适于透过沉积在基底上的墨水的光源和具有CCD传感器阵列的照相机，其中照相机适于测量透过沉积墨水的光量。 许多其他方面提供。

公开(公告)号：WO2006089105A3

公开(公告)日：2006-10-12

申请号：PCT/US2006005614

申请日：2006-02-17

Applicant: APPLIED MATERIALS INC

Inventor： SHAMOUN BASSAM ,  JOZWIAK JANUSZ ,  SHANG QUANYUAN ,  JI HONGBIN

IPC: B41J2/21 ,  B41J2/045 ,  B41M3/00 ,  G02F1/1335

CPC classification number: B41J2/2128 ,  B41J2/04541 ,  B41J2/0456 ,  B41J2/04581 ,  B41J2/04591 ,  B41J2/04593 ,  B41J2202/09 ,  G02F1/133516 ,  H04N1/4015

Abstract: The present invention provides methods and apparatus for controlling the quantity of fluid output (e.g., drop size) by individual nozzles of a print head to a very high precision at a frequency equal to the frequency at which fluid is normally dispensed. This is achieved by mapping fluid quantity control information into the data that represents the image to be printed. Data representative of an image is received and converted into pixel data. In at least one embodiment, the pixel data includes pixels represented by N bits, and the N bits may represent a drop size for the pixel and a union of the N bits may represent a nozzle status. A print head may be controlled based on the pixel data, and the print head may include nozzles that are each adapted to deposit at least one drop size quantity of a fluid on a substrate.

Abstract translation: 本发明提供了用于以等于流体正常分配的频率的频率以非常高的精度控制打印头的各个喷嘴的流体输出量（例如液滴尺寸）的方法和装置。 这通过将流体数量控制信息映射到表示要打印的图像的数据来实现。 代表图像的数据被接收并被转换为像素数据。 在至少一个实施例中，像素数据包括由N位表示的像素，并且N位可以表示像素的液滴大小，并且N位的并集可以表示喷嘴状态。 基于像素数据可以控制打印头，并且打印头可以包括喷嘴，每个喷嘴适于将至少一个墨滴量的流体沉积在基板上。

公开(公告)号：WO2005101100A3

公开(公告)日：2006-08-24

申请号：PCT/US2005011319

申请日：2005-04-01

Applicant: APPLIED MATERIALS INC ,  MERRY WALTER R ,  SHANG QUANYUAN ,  WHITE JOHN M

Inventor： MERRY WALTER R ,  SHANG QUANYUAN ,  WHITE JOHN M

IPC: H01J37/32 ,  B44C1/22 ,  C23F1/00 ,  G02F20060101 ,  H01J37/16 ,  H01J37/18 ,  H01L21/302

CPC classification number: H01J37/3244 ,  H01J37/32357 ,  H01J37/32522 ,  H01J37/32788 ,  H01J2237/3325 ,  H01J2237/334

Abstract: Embodiments of a cluster tool, processing chamber and method for processing a film stack are provided. In one embodiment, a method for in-situ etching of silicon and metal layers of a film stack is provided that includes the steps of etching an upper metal layer of the film stack in a processing chamber to expose a portion of an underlying silicon layer, and etching a trench in the silicon layer without removing the substrate from the processing chamber. The invention is particularly useful for thin film transistor fabrication for flat panel displays.

Abstract translation: 提供了一种用于处理薄膜叠层的集群工具，处理室和方法的实施例。 在一个实施例中，提供了一种用于原位蚀刻膜堆叠的硅和金属层的方法，其包括以下步骤：在处理室中蚀刻膜堆叠的上金属层以暴露下层硅层的一部分， 并且在硅层中蚀刻沟槽而不从处理室移除衬底。 本发明对于平板显示器的薄膜晶体管制造特别有用。

公开(公告)号：WO03015136A3

公开(公告)日：2003-10-16

申请号：PCT/US0224508

申请日：2002-07-31

Applicant: APPLIED MATERIALS INC

Inventor： YADAV SANJAY ,  SHANG QUANYUAN ,  KELLER ERNST ,  CHANG WEI

IPC: C23C16/458 ,  H01L21/205 ,  H01L21/683 ,  H01L21/00

CPC classification number: H01L21/6838

Abstract: Provided herein is a method of improving the planarity of a support plate of a susceptor for use during deposition of a film of material onto a substrate comprising the steps of reducing pressure in a hollow core of a shaft to a level below atmospheric pressure; and reducing a pressure in the deposition chamber to a level required for the deposition of the film of material onto the substrate, where the pressure in the hollow core of the shaft acts upon a lower surface of the support plate connected to the shaft and interfacing with the hollow core of the shaft and the pressure in the deposition chamber acts upon a upper surface of the support plate adapted to support the substrate thereby improving planarity. Also provided are a susceptor and a method of depositing a film onto a substrate affixed to the susceptor of the present invention.

Abstract translation: 本文提供了一种提高用于将材料膜沉积到基材上的基座的支撑板的平面度的方法，包括以下步骤：将轴的空心芯中的压力降低到低于大气压的水平; 并且将沉积室中的压力降低到将材料膜沉积到基底上所需的水平，其中轴的中空芯中的压力作用在连接到轴的支撑板的下表面并与 轴的中空芯和沉积室中的压力作用在支撑板的上表面，其适于支撑基板，从而改善平面度。 还提供了一种感受器和将薄膜沉积在固定到本发明的基座上的基底上的方法。