Invention Application
- Patent Title: ELECTROTHERMAL SELF-LATCHING MEMS SWITCH AND METHOD
- Patent Title (中): 电热自锁式MEMS开关及方法
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Application No.: PCT/US0236009Application Date: 2002-11-08
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Publication No.: WO03041133A3Publication Date: 2003-09-12
- Inventor: CUNNINGHAM SHAWN J
- Applicant: CONVENTOR INC , CUNNINGHAM SHAWN J
- Assignee: CONVENTOR INC,CUNNINGHAM SHAWN J
- Current Assignee: CONVENTOR INC,CUNNINGHAM SHAWN J
- Priority: US33752701 2001-11-09; US33752801 2001-11-09; US33752901 2001-11-09; US33805501 2001-11-09; US33806901 2001-11-09; US33807201 2001-11-09
- Main IPC: B81B3/00
- IPC: B81B3/00 ; B81B7/00 ; H01H1/04 ; H01H1/50 ; H01H59/00 ; H01H61/04 ; H01L21/302 ; H01L23/373 ; H01L23/522 ; H01L27/12 ; H01L29/86 ; H02N1/00 ; H02N10/00 ; H01L21/00
Abstract:
Electrothermal Self-Latching MEMS Switch and Method. According to one embodiment, a microscale switch (100) having a movable microcomponent (108) is provided and includes a substrate (102) having a stationary contact (104). The switch (100) can also include a structural layer (112) having a movable contact (108) positioned for contacting the stationary contact (104) when the structural layer (112) moves toward the substrate (102). Electrothermal latch (126) attached to the structural layer (112) and having electrical communication (114, 116) with the movable contact (108) to provide current flow between the electrothermal latch (126) and the stationary contact (104) when the movable contact (108) contacts the stationary contact (104) for maintaining the movable contact (108) in contact with the stationary contact (104).
Information query
