Invention Application
- Patent Title: APPARATUS AND METHOD FOR CLEANING TEST PROBES
- Patent Title (中): 清洁测试探针的装置和方法
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Application No.: PCT/US2003/001577Application Date: 2003-01-16
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Publication No.: WO2003062322A1Publication Date: 2003-07-31
- Inventor: KHANDROS, Igor, K. , ELDRIDGE, Benjamin, N. , FANG, Treliant , MATHIEU, Gaetan, L. , GRUBE, Gary, W. , DRUSH, Michael, A. , BUCKHOLTZ, Christopher, C.
- Applicant: FORMFACTOR, INC.
- Applicant Address: 2140 Research Drive, Livermore, CA 94550 US
- Assignee: FORMFACTOR, INC.
- Current Assignee: FORMFACTOR, INC.
- Current Assignee Address: 2140 Research Drive, Livermore, CA 94550 US
- Agency: MERKADEAU, Stuart, L.
- Priority: US10/050,908 20020118
- Main IPC: C08L83/04
- IPC: C08L83/04
Abstract:
A probe cleaning apparatus for cleaning a probe tip use to test semiconductors dies having an abrasive substrate layer an a tacky gel layer on top of the abrasive surface of the abrasive substrate layer. The probe tip is cleaned by passing it through the tacky gel layer so that it comes in contact with the abrasive surface of the abrasive substrate, moving the probe tip across the abrasive surface of the substrate layer, and then removing the probe tip from the successive layers of the cleaning apparatus. The probe tip emerges from the cleaning apparatus free from debris associated with testing the semiconductor dies.
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