Invention Application
- Patent Title: PROBE FOR AN OPTICAL NEAR FIELD MICROSCOPE AND METHOD FOR PRODUCING THE SAME
- Patent Title (中): 探头的光学近场显微镜和方法及其
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Application No.: PCT/EP0314555Application Date: 2003-12-18
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Publication No.: WO2004068501A3Publication Date: 2004-11-04
- Inventor: BRANDENBURG ALBRECHT , KUENZEL CHRISTA , EBERHARD DIETMAR
- Applicant: FRAUNHOFER GES FORSCHUNG , BRANDENBURG ALBRECHT , KUENZEL CHRISTA , EBERHARD DIETMAR
- Assignee: FRAUNHOFER GES FORSCHUNG,BRANDENBURG ALBRECHT,KUENZEL CHRISTA,EBERHARD DIETMAR
- Current Assignee: FRAUNHOFER GES FORSCHUNG,BRANDENBURG ALBRECHT,KUENZEL CHRISTA,EBERHARD DIETMAR
- Priority: DE10303961 2003-01-31
- Main IPC: B81B1/00
- IPC: B81B1/00 ; B81B3/00 ; G01Q60/22 ; G12B21/06 ; G12B21/02 ; G21B21/02
Abstract:
The invention relates to a probe for an optical near field microscope, said probe comprising a tip which is formed on a self-contained carrier, and to a method for producing the same. The aim of the invention is to provide a probe for an optical near field microscope and a method for the production thereof, whereby the probe has a tip with a very small aperture diameter and can thus be produced in a reproducible manner, according to a simple, advantageously controllable method. To this end, the inventive probe is characterised in that the probe tip is embodied as a complete structure which is applied to a planar surface of the carrier, and the inventive method comprises the following steps: a transparent layer is applied to a substrate, the thickness of the transparent layer corresponding to at least the height of the probe tip; the transparent layer is masked in at least one region of the probe tip; and the transparent layer is etched, forming the probe tip.
Information query