Invention Application
- Patent Title: PROBE CARD CONFIGURATION FOR LOW MECHANICAL FLEXURAL STRENGTH ELECTRICAL ROUTING SUBSTRATES
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Application No.: PCT/US2005/001551Application Date: 2005-01-18
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Publication No.: WO2005069914A3Publication Date: 2005-08-04
- Inventor: SHINDE, Makarand, S. , LARDER, Richard, A. , COOPER, Timothy, E. , SHENOY, Ravindra, V. , ELDRIDGE, Benjamin, N.
- Applicant: FORMFACTOR, INC. , SHINDE, Makarand, S. , LARDER, Richard, A. , COOPER, Timothy, E. , SHENOY, Ravindra, V. , ELDRIDGE, Benjamin, N.
- Applicant Address: 7005 South Front Road, Livermore, California 94551 US
- Assignee: FORMFACTOR, INC.,SHINDE, Makarand, S.,LARDER, Richard, A.,COOPER, Timothy, E.,SHENOY, Ravindra, V.,ELDRIDGE, Benjamin, N.
- Current Assignee: FORMFACTOR, INC.,SHINDE, Makarand, S.,LARDER, Richard, A.,COOPER, Timothy, E.,SHENOY, Ravindra, V.,ELDRIDGE, Benjamin, N.
- Current Assignee Address: 7005 South Front Road, Livermore, California 94551 US
- Agency: MERKADEAU, Stuart, L. et al.
- Priority: US60/537,324 20040116; US10/771,099 20040202
- Main IPC: G01R31/02
- IPC: G01R31/02
Abstract:
A mechanical support configuration for a probe card of a wafer test system is provided to increase support for a very low flexural strength substrate that supports spring probes. Increased mechanical support is provided by: (1) a frame around the periphery of the substrate having an increased sized horizontal extension over the surface of the substrate; (2) leaf springs with a bend enabling the leaf springs to extend vertically and engage the inner frame closer to the spring probes; (3) an insulating flexible membrane, or load support member machined into the inner frame, to engage the low flexural strength substrate farther away from its edge; (4) a support structure, such as support pins, added to provide support to counteract probe loading near the center of the space transformer substrate; and/or (5) a highly rigid interface
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