公开(公告)号：WO2005081001A1

公开(公告)日：2005-09-01

申请号：PCT/US2005/005087

申请日：2005-02-15

Applicant: FORMFACTOR, INC. ,  COOPER, Timothy, E. ,  ELDRIDGE, Benjamin, N. ,  KHANDROS, Igor, K. ,  MARTENS, Rod ,  MATHIEU, Gaetan, L.

Inventor： COOPER, Timothy, E. ,  ELDRIDGE, Benjamin, N. ,  KHANDROS, Igor, K. ,  MARTENS, Rod ,  MATHIEU, Gaetan, L.

IPC: G01R31/02

CPC classification number: G01R31/2886 ,  G01R31/2887

Abstract: An electronic device is moved into a first position such that terminals of the electronic device are adjacent probes for making electrical contact with the terminals. The electronic device is then moved horizontally or diagonally such that the terminals contact the probes. Test data are then communicated to and from the electronic device through the probes.

Abstract translation: 电子设备移动到第一位置，使得电子设备的端子是与端子电接触的相邻探头。 然后电子设备水平或对角地移动，使得端子接触探针。 然后通过探头将测试数据传送到电子设备和从电子设备传送。

公开(公告)号：WO2005069914A2

公开(公告)日：2005-08-04

申请号：PCT/US2005001551

申请日：2005-01-18

Applicant: FORMFACTOR INC ,  SHINDE MAKARAND S ,  LARDER RICHARD A ,  COOPER TIMOTHY E ,  SHENOY RAVINDRA V ,  ELDRIDGE BENJAMIN N

Inventor： SHINDE MAKARAND S ,  LARDER RICHARD A ,  COOPER TIMOTHY E ,  SHENOY RAVINDRA V ,  ELDRIDGE BENJAMIN N

IPC: G01R31/02 ,  G01R31/28

CPC classification number: G01R31/2889 ,  G01R1/07378

Abstract: A mechanical support configuration for a probe card of a wafer test system is provided to increase support for a very low flexural strength substrate that supports spring probes. Increased mechanical support is provided by: (1) a frame around the periphery of the substrate having an increased sized horizontal extension over the surface of the substrate; (2) leaf springs with a bend enabling the leaf springs to extend vertically and engage the inner frame closer to the spring probes; (3) an insulating flexible membrane, or load support member machined into the inner frame, to engage the low flexural strength substrate farther away from its edge; (4) a support structure, such as support pins, added to provide support to counteract probe loading near the center of the space transformer substrate; and/or (5) a highly rigid interface

Abstract translation: 提供了用于晶片测试系统的探针卡的机械支撑结构，以增加对支撑弹簧探针的极低弯曲强度基底的支撑。 通过以下方式提供增加的机械支撑：（1）围绕基板的周边的框架，在基板的表面上具有增大尺寸的水平延伸; （2）具有弯曲的板簧，使得板簧能够垂直延伸并使内框架接近弹簧探针; （3）绝缘柔性膜或加工到内框架中的负载支撑构件，使低弯曲强度基板与其边缘更远地接合; （4）加载支撑结构，例如支撑销，以提供支撑以抵消在空间变压器基板的中心附近的探针负载; 和/或（5）高刚性界面

公开(公告)号：WO2005069914A3

公开(公告)日：2005-08-04

申请号：PCT/US2005/001551

申请日：2005-01-18

Applicant: FORMFACTOR, INC. ,  SHINDE, Makarand, S. ,  LARDER, Richard, A. ,  COOPER, Timothy, E. ,  SHENOY, Ravindra, V. ,  ELDRIDGE, Benjamin, N.

Inventor： SHINDE, Makarand, S. ,  LARDER, Richard, A. ,  COOPER, Timothy, E. ,  SHENOY, Ravindra, V. ,  ELDRIDGE, Benjamin, N.

IPC: G01R31/02

Abstract: A mechanical support configuration for a probe card of a wafer test system is provided to increase support for a very low flexural strength substrate that supports spring probes. Increased mechanical support is provided by: (1) a frame around the periphery of the substrate having an increased sized horizontal extension over the surface of the substrate; (2) leaf springs with a bend enabling the leaf springs to extend vertically and engage the inner frame closer to the spring probes; (3) an insulating flexible membrane, or load support member machined into the inner frame, to engage the low flexural strength substrate farther away from its edge; (4) a support structure, such as support pins, added to provide support to counteract probe loading near the center of the space transformer substrate; and/or (5) a highly rigid interface