The invention relates to a method and device (1) for treating surfaces (5) of materials by means of a radiation (4) and of an electrostatic field (18), during which a flow (19) of aerosol/gas consisting of atoms, molecules, particles (14) and/or of electrically charged particles (15) is formed to the sides of the material surface. The electrically charged particles are deflected by the electrostatic field, are discharged on an electrode (7, 8) having a polarization opposite that of the electrically charged particles, and are condensed there. The atoms, molecules and particles moving inside the flow of aerosol/gas are modified by a radiation (4) having a specified wavelength to form ions and/or electrically charged particles whereby a photon energy of the radiation is generated with the wavelength. This radiation is matched to the binding energy/ion energy of the molecules, atoms of the flow of aerosol/gas and/or to the exit energy of electrons in the electrically neutral particles in such a manner that, inside the flow of aerosol/gas, the molecular bonds are broken and the electrically neutral atoms, molecules and particles are converted into ions and/or electrically charged particles.