Invention Application
WO2006091474A3 ELECTRIC HEATER WITH RESISTIVE CARBON HEATING ELEMENTS 审中-公开
具有电加热元件的电加热器

ELECTRIC HEATER WITH RESISTIVE CARBON HEATING ELEMENTS
Abstract:
A heater, such as a susceptor for use in electronics industry manufacturing processes, and a method for manufacture of such a heater. A resistance heating assembly includes a carbon fiber reinforced carbon conductor and the heating element is free to move slightly relative to an outer casing in response to differences between the coefficients of thermal expansion of the resistance heating element and the outer casing. A resistance heating element of carbon is potted to protect against oxidation. A slip layer of a powdered ceramic allows movement of the heating element relative to a housing.
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