Abstract:
Metal oxide varistor and method of manufacturing The present invention concerns a metal oxide varistor which comprises a disc (2) of a varistor material, a first metallization electrode (3) arranged on the disc (2) and an encapsulation (1) of an insulating material in which the disc (2) is at least partly embedded. Moreover, the invention concerns a method of manufacturing the metal oxide varistor, wherein the encapsulation (1) of the insulating material is applied on the disc (2) by thermal molding.
Abstract:
A connector for providing electronic communication with an electronic device is disclosed. The connector can comprise a substrate comprising layers of non-conductive material and conductive material. The connector can include an interface member mounted to the substrate and electrically connected with the conductor. A positive temperature coefficient (PTC) fuse can be embedded in the substrate and electrically connected with the conductor and the interface member. At least a portion of the PTC fuse can be disposed directly below the interface member.
Abstract:
A thermal plate for a substrate support assembly in a semiconductor plasma processing apparatus, comprises multiple independently controllable planar thermal zones arranged in a scalable multiplexing layout, and electronics to independently control and power the planar heater zones. Each planar thermal zone uses at least one Peltier device as a thermoelectric element. A substrate support assembly in which the thermal plate is incorporated includes an electrostatic clamping electrode layer and a temperature controlled base plate. Methods for manufacturing the thermal plate include bonding together ceramic or polymer sheets having planar thermal zones, positive, negative and common lines and vias.
Abstract:
A heater, such as a susceptor for use in electronics industry manufacturing processes, and a method for manufacture of such a heater. A resistance heating assembly includes a carbon fiber reinforced carbon conductor and the heating element is free to move slightly relative to an outer casing in response to differences between the coefficients of thermal expansion of the resistance heating element and the outer casing. A resistance heating element of carbon is potted to protect against oxidation. A slip layer of a powdered ceramic allows movement of the heating element relative to a housing.