Invention Application
- Patent Title: APPARATUS AND PROCESS FOR STORAGE AND DISPENSING OF CHEMICAL REAGENTS AND COMPOSITIONS
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Application No.: PCT/US2006/015679Application Date: 2006-04-25
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Publication No.: WO2006116428A3Publication Date: 2006-11-02
- Inventor: WANG, Weihua , BERNHARD, David , BAUM, Thomas, H. , MIKKELSEN, Kirk , MLYNAR, Greg , HOVINEN, Minna , TOM, Glenn, M. , O'DOUGHERTY, Kevin, T. , YAN, Hongwei
- Applicant: ADVANCED TECHNOLOGY MATERIALS, INC. , WANG, Weihua , BERNHARD, David , BAUM, Thomas, H. , MIKKELSEN, Kirk , MLYNAR, Greg , HOVINEN, Minna , TOM, Glenn, M. , O'DOUGHERTY, Kevin, T. , YAN, Hongwei
- Applicant Address: 7 Commerce Drive Danbury, Connecticut 06810-4169 US
- Assignee: ADVANCED TECHNOLOGY MATERIALS, INC.,WANG, Weihua,BERNHARD, David,BAUM, Thomas, H.,MIKKELSEN, Kirk,MLYNAR, Greg,HOVINEN, Minna,TOM, Glenn, M.,O'DOUGHERTY, Kevin, T.,YAN, Hongwei
- Current Assignee: ADVANCED TECHNOLOGY MATERIALS, INC.,WANG, Weihua,BERNHARD, David,BAUM, Thomas, H.,MIKKELSEN, Kirk,MLYNAR, Greg,HOVINEN, Minna,TOM, Glenn, M.,O'DOUGHERTY, Kevin, T.,YAN, Hongwei
- Current Assignee Address: 7 Commerce Drive Danbury, Connecticut 06810-4169 US
- Agency: HULTQUIST, Steven, J.
- Priority: US60/674,577 20050425
- Main IPC: B65D35/22
- IPC: B65D35/22
Abstract:
A fluid storage and dispensing package, including a rigid overpack defining an interior volume, a liner disposed in the interior volume of the overpack to hold liquid medium, and a positional fixation structure arranged to restrain movement of the liner when holding liquid medium, wherein the positional fixation structure is not in contact with liquid medium when liquid medium is contained in the liner. Such package, and associated packaging method, preferably involves zero-headspace containment of the liquid or liquid-containing material, and is particularly advantageous in application to storage and dispensing of film-forming colloidal silica-based chemical mechanical polishing (CMP) compositions, with respect to suppressing the presence of microbubbles and unwanted particles.
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