Invention Application
- Patent Title: VIBRATING MICROMECHANICAL SENSOR OF ANGULAR VELOCITY
- Patent Title (中): 振动微观传感器的角速度
-
Application No.: PCT/FI2008/050539Application Date: 2008-09-29
-
Publication No.: WO2009043967A1Publication Date: 2009-04-09
- Inventor: KLEMETTI, Petri , NERA, Kaisa , LIPSANEN, Antti , BLOMQVIST, Anssi , TORKKELI, Altti
- Applicant: VTI TECHNOLOGIES OY , KLEMETTI, Petri , NERA, Kaisa , LIPSANEN, Antti , BLOMQVIST, Anssi , TORKKELI, Altti
- Applicant Address: Pl 27 FI-01621 Vantaa FI
- Assignee: VTI TECHNOLOGIES OY,KLEMETTI, Petri,NERA, Kaisa,LIPSANEN, Antti,BLOMQVIST, Anssi,TORKKELI, Altti
- Current Assignee: VTI TECHNOLOGIES OY,KLEMETTI, Petri,NERA, Kaisa,LIPSANEN, Antti,BLOMQVIST, Anssi,TORKKELI, Altti
- Current Assignee Address: Pl 27 FI-01621 Vantaa FI
- Agency: BORENIUS & Co Oy Ab
- Priority: FI20075708 20071005
- Main IPC: G01P3/02
- IPC: G01P3/02 ; G01P15/097 ; G01C19/56
Abstract:
The invention relates to measuring devices to be used in the measuring of angular velocity and, more precisely, to vibrating micromechanical sensors of angular velocity. In a sensor of angular velocity according to the invention, a mass is supported to the frame of the sensor component by means of an asymmetrical spring structure (1), (2), (3), (4), (22), (24) in such a way, that the coupling from one mode of motion to another, conveyed by the spring (1), (2), (3), (4), (22), (24), cancels or alleviates the coupling caused by the non-ideality due to the skewness in the springs or in their support. The structure of the sensor of angular velocity according to the invention enables reliable measuring with good performance, particularly in small vibrating micromechanical solutions for sensors of angular velocity.
Information query
IPC分类:
