Invention Application
- Patent Title: GAS TRANSPORT DELAY RESOLUTION FOR SHORT ETCH RECIPES
- Patent Title (中): 用于短时间食谱的气体运输延迟分辨率
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Application No.: PCT/US2008/087270Application Date: 2008-12-17
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Publication No.: WO2009085866A2Publication Date: 2009-07-09
- Inventor: SHAREEF, Iqbal , TASKAR, Mark , ZEMLOCK, Tony
- Applicant: LAM RESEARCH CORPORATION , SHAREEF, Iqbal , TASKAR, Mark , ZEMLOCK, Tony
- Applicant Address: 4650 Cushing Parkway Fremont, California 94538 US
- Assignee: LAM RESEARCH CORPORATION,SHAREEF, Iqbal,TASKAR, Mark,ZEMLOCK, Tony
- Current Assignee: LAM RESEARCH CORPORATION,SHAREEF, Iqbal,TASKAR, Mark,ZEMLOCK, Tony
- Current Assignee Address: 4650 Cushing Parkway Fremont, California 94538 US
- Agency: YEUNG, Adrienne et al.
- Priority: US61/016,908 20071227
- Main IPC: F17D3/03
- IPC: F17D3/03 ; F17D3/00 ; H01L21/00
Abstract:
In one embodiment, an apparatus for providing a gas mixture of a plurality of gases, may have a plurality of mass flow controllers (MFCs), a mixing manifold in fluid connection with each plurality of MFCs, a plurality of mixing manifold exits positioned on the mixing manifold; and an isolation device in fluid connection with each of the plurality of mixing manifold exits.
Information query
