公开(公告)号：WO2009085866A2

公开(公告)日：2009-07-09

申请号：PCT/US2008/087270

申请日：2008-12-17

Applicant: LAM RESEARCH CORPORATION ,  SHAREEF, Iqbal ,  TASKAR, Mark ,  ZEMLOCK, Tony

Inventor： SHAREEF, Iqbal ,  TASKAR, Mark ,  ZEMLOCK, Tony

IPC: F17D3/03 ,  F17D3/00 ,  H01L21/00

CPC classification number: H01L21/67069 ,  H01L21/67253 ,  Y10T137/0318 ,  Y10T137/877 ,  Y10T137/87885

Abstract: In one embodiment, an apparatus for providing a gas mixture of a plurality of gases, may have a plurality of mass flow controllers (MFCs), a mixing manifold in fluid connection with each plurality of MFCs, a plurality of mixing manifold exits positioned on the mixing manifold; and an isolation device in fluid connection with each of the plurality of mixing manifold exits.

Abstract translation: 在一个实施例中，用于提供多种气体的气体混合物的装置可以具有多个质量流量控制器（MFC），与每个多个MFC流体连接的混合歧管， 位于混合歧管上的多个混合歧管出口; 以及与多个混合歧管出口中的每一个流体连接的隔离装置。

公开(公告)号：WO2009085866A4

公开(公告)日：2009-11-19

申请号：PCT/US2008087270

申请日：2008-12-17

Applicant: LAM RES CORP ,  SHAREEF IQBAL ,  TASKAR MARK ,  ZEMLOCK TONY

Inventor： SHAREEF IQBAL ,  TASKAR MARK ,  ZEMLOCK TONY

IPC: F17D3/03 ,  F17D3/00 ,  H01L21/00

CPC classification number: H01L21/67069 ,  H01L21/67253 ,  Y10T137/0318 ,  Y10T137/877 ,  Y10T137/87885

Abstract: In one embodiment, an apparatus for providing a gas mixture of a plurality of gases, may have a plurality of mass flow controllers (MFCs), a mixing manifold in fluid connection with each plurality of MFCs, a plurality of mixing manifold exits positioned on the mixing manifold; and an isolation device in fluid connection with each of the plurality of mixing manifold exits.

Abstract translation: 在一个实施例中，用于提供多种气体的气体混合物的设备可以具有多个质量流量控制器（MFC），与每个多个MFC流体连接的混合歧管，位于所述多个混合歧管中的多个混合歧管出口 混合歧管; 以及与多个混合歧管出口中的每一个流体连接的隔离装置。

公开(公告)号：WO2006135624A3

公开(公告)日：2006-12-21

申请号：PCT/US2006/022060

申请日：2006-06-06

Applicant: LAM RESEARCH CORPORATION ,  TASKAR, Mark

Inventor： TASKAR, Mark

IPC: F16K35/00

Abstract: An optimized activation prevention assembly for a gas delivery system is disclosed. The apparatus includes a pneumatically operated valve assembly. The apparatus also includes a toggle switch mechanically attached to the pneumatically operated valve assembly, the toggle switch includes a toggle arm, the toggle arm being positioned in one of an activation zone and a deactivation zone, wherein when the toggle arm is positioned in the activation zone, the pneumatically operated valve is activated, and wherein when the toggle arm is positioned in the deactivation zone, the pneumatically operated valve is deactivated. The apparatus further includes an activation prevention mechanism attached to the toggle switch, wherein when the activation prevention mechanism being configured for preventing the toggle arm from being repositioned from the deactivation zone to the activation zone without at least bypassing a lockout function of the optimized activation prevention mechanism.

公开(公告)号：WO2006135624B1

公开(公告)日：2008-01-17

申请号：PCT/US2006022060

申请日：2006-06-06

Applicant: LAM RES CORP ,  TASKAR MARK

Inventor： TASKAR MARK

IPC: F16K35/00

CPC classification number: F16K35/06 ,  Y10T70/5637 ,  Y10T137/0491 ,  Y10T137/7069

Abstract: An optimized activation prevention assembly for a gas delivery system is disclosed. The apparatus includes a pneumatically operated valve assembly. The apparatus also includes a toggle switch mechanically attached to the pneumatically operated valve assembly, the toggle switch includes a toggle arm, the toggle arm being positioned in one of an activation zone and a deactivation zone, wherein when the toggle arm is positioned in the activation zone, the pneumatically operated valve is activated, and wherein when the toggle arm is positioned in the deactivation zone, the pneumatically operated valve is deactivated. The apparatus further includes an activation prevention mechanism attached to the toggle switch, wherein when the activation prevention mechanism being configured for preventing the toggle arm from being repositioned from the deactivation zone to the activation zone without at least bypassing a lockout function of the optimized activation prevention mechanism.

Abstract translation: 公开了一种用于气体输送系统的优化的激活预防组件。 该装置包括气动阀组件。 该装置还包括机械连接到气动操作的阀组件上的拨动开关，该拨动开关包括肘节臂，肘节臂位于活动区域和失活区域中的一个中，其中当肘节臂位于激活状态时 气动阀被启动，并且其中当肘节臂位于停用区域中时，气动操作的阀被停用。 所述装置还包括附接到所述拨动开关的激活预防机构，其中当所述启动防止机构被配置为防止所述肘节臂从所述停用区域重新定位到所述激活区域，而不至少绕过所述优化的激活预防的锁定功能 机制。

公开(公告)号：WO2012174053A1

公开(公告)日：2012-12-20

申请号：PCT/US2012/042158

申请日：2012-06-13

Applicant: LAM RESEARCH CORPORATION ,  TASKAR, Mark ,  SHAREEF, Iqbal

Inventor： TASKAR, Mark ,  SHAREEF, Iqbal

IPC: B08B5/02

CPC classification number: F17D1/00 ,  B08B15/002 ,  B08B15/04 ,  F17C1/00 ,  F17C2221/031 ,  G01M3/22 ,  Y10T137/0318 ,  Y10T137/6851 ,  Y10T137/7736 ,  Y10T137/7761 ,  Y10T137/86107

Abstract: A method and apparatus is provided for decreasing the scrubber exhaust from gas panels, lower the cost of operation, lower the facilitation cost and power consumption by increasing the air velocity in areas of high potential risk of ignition. The apparatus includes a supply of compressed dry air (CDA) through the tubing with individual dispersion nozzles. The CDA dispersion nozzles can be installed at various key locations in order to provide additional ventilation turbulence and reduce potential dead zones inside the gas panel. Aspects of the invention help to save the energy and protect the environment by reducing the power consumption. In addition human safety shall be improved by minimizing the potential risk of ignition.

Abstract translation: 提供一种方法和装置，用于减少来自气体面板的洗涤器排气，降低操作成本，通过在高潜在的点火风险区域中增加空气速度来降低便利成本和功率消耗。 该设备包括通过具有各个分散喷嘴的管道供应压缩干燥空气（CDA）。 CDA分散喷嘴可以安装在各种关键位置，以便提供额外的通风湍流并减少气体面板内的潜在死区。 本发明的方面有助于通过降低功耗来节省能源和保护环境。 另外，通过最小化潜在的点火风险，可以改善人身安全。

公开(公告)号：WO2009085866A3

公开(公告)日：2009-10-01

申请号：PCT/US2008087270

申请日：2008-12-17

Applicant: LAM RES CORP ,  SHAREEF IQBAL ,  TASKAR MARK ,  ZEMLOCK TONY

Inventor： SHAREEF IQBAL ,  TASKAR MARK ,  ZEMLOCK TONY

IPC: F17D3/03 ,  F17D3/00 ,  H01L21/00

CPC classification number: H01L21/67069 ,  H01L21/67253 ,  Y10T137/0318 ,  Y10T137/877 ,  Y10T137/87885

Abstract: In one embodiment, an apparatus for providing a gas mixture of a plurality of gases, may have a plurality of mass flow controllers (MFCs), a mixing manifold in fluid connection with each plurality of MFCs, a plurality of mixing manifold exits positioned on the mixing manifold; and an isolation device in fluid connection with each of the plurality of mixing manifold exits.

Abstract translation: 在一个实施例中，用于提供多种气体的气体混合物的设备可以具有多个质量流量控制器（MFC），与每个MFC流体连接的混合歧管，多个混合歧管出口定位在 混合歧管 以及与多个混合歧管出口中的每一个流体连接的隔离装置。

公开(公告)号：WO2006135624A2

公开(公告)日：2006-12-21

申请号：PCT/US2006022060

申请日：2006-06-06

Applicant: LAM RES CORP ,  TASKAR MARK

Inventor： TASKAR MARK

IPC: F16K35/00

CPC classification number: F16K35/06 ,  Y10T70/5637 ,  Y10T137/0491 ,  Y10T137/7069

Abstract: An optimized activation prevention assembly for a gas delivery system is disclosed. The apparatus includes a pneumatically operated valve assembly. The apparatus also includes a toggle switch mechanically attached to the pneumatically operated valve assembly, the toggle switch includes a toggle arm, the toggle arm being positioned in one of an activation zone and a deactivation zone, wherein when the toggle arm is positioned in the activation zone, the pneumatically operated valve is activated, and wherein when the toggle arm is positioned in the deactivation zone, the pneumatically operated valve is deactivated. The apparatus further includes an activation prevention mechanism attached to the toggle switch, wherein when the activation prevention mechanism being configured for preventing the toggle arm from being repositioned from the deactivation zone to the activation zone without at least bypassing a lockout function of the optimized activation prevention mechanism.

Abstract translation: 公开了一种用于气体输送系统的优化的激活预防组件。 该装置包括气动阀组件。 该装置还包括机械连接到气动操作的阀组件上的拨动开关，该拨动开关包括肘节臂，肘节臂位于活动区域和失活区域中的一个中，其中当肘节臂位于激活状态时 气动阀被启动，并且其中当肘节臂位于停用区域中时，气动操作的阀被停用。 所述装置还包括附接到所述拨动开关的激活预防机构，其中当所述启动防止机构被配置为防止所述肘节臂从所述停用区域重新定位到所述激活区域，而不至少绕过所述优化的激活预防的锁定功能 机制。