Invention Application
- Patent Title: METALLIC NANOCRYSTAL ENCAPSULATION
- Patent Title (中): 金属纳米结构
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Application No.: PCT/EP2009053539Application Date: 2009-03-25
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Publication No.: WO2009118353A3Publication Date: 2009-12-17
- Inventor: DUFOURCQ JOEL , VANDROUX LAURENT , MUR PIERRE , BODNAR SYLVIE
- Applicant: ATMEL ROUSSET SAS , COMMISSARIAT ENERGIE ATOMIQUE , DUFOURCQ JOEL , VANDROUX LAURENT , MUR PIERRE , BODNAR SYLVIE
- Assignee: ATMEL ROUSSET SAS,COMMISSARIAT ENERGIE ATOMIQUE,DUFOURCQ JOEL,VANDROUX LAURENT,MUR PIERRE,BODNAR SYLVIE
- Current Assignee: ATMEL ROUSSET SAS,COMMISSARIAT ENERGIE ATOMIQUE,DUFOURCQ JOEL,VANDROUX LAURENT,MUR PIERRE,BODNAR SYLVIE
- Priority: US5526208 2008-03-25
- Main IPC: C30B25/00
- IPC: C30B25/00 ; C23C16/56 ; C30B29/52 ; C30B29/60 ; C30B33/00
Abstract:
A method of forming a device includes forming protective shells about metallic nanocrystals supported by a substrate. The metallic nanocrystals having protective shells are encapsulated with a layer formed with process parameters that are not compatible with the integrity of unprotected metallic nanocrystals. The nanocrystals can be out Ni, Pt, Ag, or W with a shell of SiO2.
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