Invention Application
- Patent Title: ROLL TO ROLL OLED PRODUCTION SYSTEM
- Patent Title (中): 滚动OLED生产系统
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Application No.: PCT/US2009041709Application Date: 2009-04-24
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Publication No.: WO2009134697A3Publication Date: 2010-03-04
- Inventor: WHITE JOHN M , TAKEHARA TAKAKO
- Applicant: APPLIED MATERIALS INC , WHITE JOHN M , TAKEHARA TAKAKO
- Assignee: APPLIED MATERIALS INC,WHITE JOHN M,TAKEHARA TAKAKO
- Current Assignee: APPLIED MATERIALS INC,WHITE JOHN M,TAKEHARA TAKAKO
- Priority: US4903208 2008-04-30
- Main IPC: H01L51/56
- IPC: H01L51/56 ; H01L51/52 ; H05B33/10
Abstract:
The present invention generally relates to a method and an apparatus for processing one or more substrates on a roll to roll system. The one or more substrates may pass through several processing chambers to deposit the layers necessary to produce an OLED structure. The processing chambers may include ink jetting chambers, chemical vapor deposition (CVD) chambers, physical vapor deposition (PVD) chambers, and annealing chambers. Additional chambers may also be present.
Information query
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