Invention Application
WO2010086153A1 GRADED WELL IMPLANTATION FOR ASYMMETRIC TRANSISTORS HAVING REDUCED GATE ELECTRODE PITCHES 审中-公开
具有减少栅极电极板的不对称晶体管的分级井植入

GRADED WELL IMPLANTATION FOR ASYMMETRIC TRANSISTORS HAVING REDUCED GATE ELECTRODE PITCHES
Abstract:
In sophisticated semiconductor devices and asymmetric transistor configuration may be obtained on the basis of an asymmetric well implantation while avoiding a tilted implantation process. For this purpose a graded implantation mask may be formed, such as a graded resist mask, which may have a higher ion blocking capability at the drain side compared to the source side of the asymmetric transistor. For instance, the asymmetric configuration may be obtained on the basis of a non-tilted implantation process with a high degree of performance gain and may be accomplished irrespective of the technology standard under consideration.
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