Invention Application
WO2010086153A1 GRADED WELL IMPLANTATION FOR ASYMMETRIC TRANSISTORS HAVING REDUCED GATE ELECTRODE PITCHES
审中-公开
具有减少栅极电极板的不对称晶体管的分级井植入
- Patent Title: GRADED WELL IMPLANTATION FOR ASYMMETRIC TRANSISTORS HAVING REDUCED GATE ELECTRODE PITCHES
- Patent Title (中): 具有减少栅极电极板的不对称晶体管的分级井植入
-
Application No.: PCT/EP2010/000491Application Date: 2010-01-27
-
Publication No.: WO2010086153A1Publication Date: 2010-08-05
- Inventor: MULFINGER, Robert , WEI, Andy , HOENTSCHEL, Jan , PAPAGEORGIOU, Vassilios
- Applicant: ADVANCED MICRO DEVICES, INC , MULFINGER, Robert , WEI, Andy , HOENTSCHEL, Jan , PAPAGEORGIOU, Vassilios , AMD FAB 36 LIMITED LIABILITY COMPANY & CO. KG
- Applicant Address: One AMD Place, Mail Stop 68 Sunnyvale, CA 94088-3453 US
- Assignee: ADVANCED MICRO DEVICES, INC,MULFINGER, Robert,WEI, Andy,HOENTSCHEL, Jan,PAPAGEORGIOU, Vassilios,AMD FAB 36 LIMITED LIABILITY COMPANY & CO. KG
- Current Assignee: ADVANCED MICRO DEVICES, INC,MULFINGER, Robert,WEI, Andy,HOENTSCHEL, Jan,PAPAGEORGIOU, Vassilios,AMD FAB 36 LIMITED LIABILITY COMPANY & CO. KG
- Current Assignee Address: One AMD Place, Mail Stop 68 Sunnyvale, CA 94088-3453 US
- Agency: PFAU, Anton, K.
- Priority: DE10 20090130; US12/692,886 20100125
- Main IPC: H01L21/266
- IPC: H01L21/266 ; H01L21/336 ; H01L29/10 ; H01L21/8234 ; H01L29/78 ; H01L21/3115 ; H01L21/311 ; H01L21/027
Abstract:
In sophisticated semiconductor devices and asymmetric transistor configuration may be obtained on the basis of an asymmetric well implantation while avoiding a tilted implantation process. For this purpose a graded implantation mask may be formed, such as a graded resist mask, which may have a higher ion blocking capability at the drain side compared to the source side of the asymmetric transistor. For instance, the asymmetric configuration may be obtained on the basis of a non-tilted implantation process with a high degree of performance gain and may be accomplished irrespective of the technology standard under consideration.
Information query
IPC分类: