Invention Application
- Patent Title: ROLLER ASSEMBLY FOR A BRUSH CLEANING DEVICE IN A CLEANING MODULE
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Application No.: PCT/US2010/045709Application Date: 2010-08-17
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Publication No.: WO2011043866A4Publication Date: 2011-04-14
- Inventor: KARUPPIAH, Lakshmanan , ZHANG, Dan , YAVELBERG, Simon , ATKINSON, Jim K. , CHEN, Hung Chih , MANTO, Noel , DOMIN, Jonathan
- Applicant: APPLIED MATERIALS, INC. , KARUPPIAH, Lakshmanan , ZHANG, Dan , YAVELBERG, Simon , ATKINSON, Jim K. , CHEN, Hung Chih , MANTO, Noel , DOMIN, Jonathan
- Applicant Address: 3050 Bowers Avenue Santa Clara, CA 95054 US
- Assignee: APPLIED MATERIALS, INC.,KARUPPIAH, Lakshmanan,ZHANG, Dan,YAVELBERG, Simon,ATKINSON, Jim K.,CHEN, Hung Chih,MANTO, Noel,DOMIN, Jonathan
- Current Assignee: APPLIED MATERIALS, INC.,KARUPPIAH, Lakshmanan,ZHANG, Dan,YAVELBERG, Simon,ATKINSON, Jim K.,CHEN, Hung Chih,MANTO, Noel,DOMIN, Jonathan
- Current Assignee Address: 3050 Bowers Avenue Santa Clara, CA 95054 US
- Agency: PATTERSON, B. Todd et al.
- Priority: US12/573,500 20091005
- Main IPC: H01L21/302
- IPC: H01L21/302
Abstract:
Embodiments described herein relate to an apparatus and method for a roller assembly that may be utilized in a brush cleaning module. In one embodiment, a roller assembly is described. The roller assembly includes an annular groove having at least two substantially parallel opposing sidewalls adapted to contact the major surfaces of a substrate along a periphery of the substrate, each of the opposing sidewalls comprising a compressible material having a pre-compressed dimension that is less than a thickness of the periphery of the substrate.
Information query
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