公开(公告)号：WO2011043866A1

公开(公告)日：2011-04-14

申请号：PCT/US2010045709

申请日：2010-08-17

Applicant: APPLIED MATERIALS INC ,  KARUPPIAH LAKSHMANAN ,  ZHANG DAN ,  YAVELBERG SIMON ,  ATKINSON JIM K ,  CHEN HUNG CHIH ,  MANTO NOEL ,  DOMIN JONATHAN

Inventor： KARUPPIAH LAKSHMANAN ,  ZHANG DAN ,  YAVELBERG SIMON ,  ATKINSON JIM K ,  CHEN HUNG CHIH ,  MANTO NOEL ,  DOMIN JONATHAN

IPC: H01L21/302

CPC classification number: B08B1/04

Abstract: Embodiments described herein relate to an apparatus and method for a roller assembly that may be utilized in a brush cleaning module. In one embodiment, a roller assembly is described. The roller assembly includes an annular groove having at least two substantially parallel opposing sidewalls adapted to contact the major surfaces of a substrate along a periphery of the substrate, each of the opposing sidewalls comprising a compressible material having a pre-compressed dimension that is less than a thickness of the periphery of the substrate.

Abstract translation: 本文所述的实施例涉及可用于刷清洁模块中的用于辊组件的装置和方法。 在一个实施例中，描述了辊组件。 辊组件包括具有至少两个基本上平行的相对侧壁的环形凹槽，所述至少两个基本上平行的相对的侧壁适于沿着衬底的周边接触衬底的主表面，每个相对的侧壁包括具有预压缩尺寸小于 衬底的周边的厚度。

公开(公告)号：WO2010042528A2

公开(公告)日：2010-04-15

申请号：PCT/US2009059709

申请日：2009-10-06

Applicant: APPLIED MATERIALS INC ,  MELCHER CHRIS ,  BRITCHER THUY ,  TEPMAN AVI ,  YAVELBERG SIMON Y ,  TULSHIBAGWALE SHESHRAJ L

Inventor： MELCHER CHRIS ,  BRITCHER THUY ,  TEPMAN AVI ,  YAVELBERG SIMON Y ,  TULSHIBAGWALE SHESHRAJ L

IPC: H01L21/304

CPC classification number: H01L21/67219 ,  B24B37/04 ,  B24B57/02 ,  H01L21/67017 ,  Y10T137/0396 ,  Y10T137/877

Abstract: Embodiments described herein provide an application for delivery of fluids within substrate processing systems. More particularly, embodiments described herein provide applications for delivery of processing chemicals within substrate processing systems. In one embodiment, a fluid delivery system is provided. The fluid delivery system comprises a bulk fluid source for supplying fluids, a fluid delivery module for controlling and monitoring a ratio of fluids flowing from the bulk fluid source, a first stream line positioned downstream from the fluid delivery module, a first switch positioned along the first stream line, a second stream line positioned downstream from the fluid delivery module, and a second switch positioned along the second stream line, wherein the fluid delivery module splits the fluids from the bulk fluid source into two streams flowing through the first stream line and the second stream line according to a pre-defined ratio.

Abstract translation: 本文描述的实施例提供了在衬底处理系统内输送流体的应用。 更具体地，本文描述的实施例提供了在衬底处理系统内递送处理化学品的应用。 在一个实施例中，提供流体输送系统。 流体输送系统包括用于供应流体的体液源，流体输送模块，用于控制和监测从大量流体源流出的流体的比例，位于流体输送模块下游的第一流线，沿着流体输送模块定位的第一开关 第一流线，位于流体输送模块下游的第二流线和沿着第二流线定位的第二开关，其中流体输送模块将流体从本体流体源分流成流过第一流线的两股流， 第二条流线根据预定义的比例。

公开(公告)号：WO2011043866A4

公开(公告)日：2011-04-14

申请号：PCT/US2010/045709

申请日：2010-08-17

Applicant: APPLIED MATERIALS, INC. ,  KARUPPIAH, Lakshmanan ,  ZHANG, Dan ,  YAVELBERG, Simon ,  ATKINSON, Jim K. ,  CHEN, Hung Chih ,  MANTO, Noel ,  DOMIN, Jonathan

Inventor： KARUPPIAH, Lakshmanan ,  ZHANG, Dan ,  YAVELBERG, Simon ,  ATKINSON, Jim K. ,  CHEN, Hung Chih ,  MANTO, Noel ,  DOMIN, Jonathan

IPC: H01L21/302

Abstract: Embodiments described herein relate to an apparatus and method for a roller assembly that may be utilized in a brush cleaning module. In one embodiment, a roller assembly is described. The roller assembly includes an annular groove having at least two substantially parallel opposing sidewalls adapted to contact the major surfaces of a substrate along a periphery of the substrate, each of the opposing sidewalls comprising a compressible material having a pre-compressed dimension that is less than a thickness of the periphery of the substrate.

公开(公告)号：WO2010042528A3

公开(公告)日：2010-04-15

申请号：PCT/US2009/059709

申请日：2009-10-06

Applicant: APPLIED MATERIALS, INC. ,  MELCHER, Chris ,  BRITCHER, Thuy ,  TEPMAN, Avi ,  YAVELBERG, Simon Y. ,  TULSHIBAGWALE, Sheshraj L.

Inventor： MELCHER, Chris ,  BRITCHER, Thuy ,  TEPMAN, Avi ,  YAVELBERG, Simon Y. ,  TULSHIBAGWALE, Sheshraj L.

IPC: H01L21/304

Abstract: Embodiments described herein provide an application for delivery of fluids within substrate processing systems. More particularly, embodiments described herein provide applications for delivery of processing chemicals within substrate processing systems. In one embodiment, a fluid delivery system is provided. The fluid delivery system comprises a bulk fluid source for supplying fluids, a fluid delivery module for controlling and monitoring a ratio of fluids flowing from the bulk fluid source, a first stream line positioned downstream from the fluid delivery module, a first switch positioned along the first stream line, a second stream line positioned downstream from the fluid delivery module, and a second switch positioned along the second stream line, wherein the fluid delivery module splits the fluids from the bulk fluid source into two streams flowing through the first stream line and the second stream line according to a pre-defined ratio.