Invention Application
- Patent Title: DATA PATH FOR LITHOGRAPHY APPARATUS
- Patent Title (中): 数据路径为LITHOGRAPHY设备
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Application No.: PCT/EP2011/069600Application Date: 2011-11-08
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Publication No.: WO2012062727A1Publication Date: 2012-05-18
- Inventor: WIELAND, Marco Jan-Jaco , VAN DE PEUT, Teunis , VAN DER WILT, Floris Pepijn , HABEKOTTE, Ernst
- Applicant: MAPPER LITHOGRAPHY IP B.V. , WIELAND, Marco Jan-Jaco , VAN DE PEUT, Teunis , VAN DER WILT, Floris Pepijn , HABEKOTTE, Ernst
- Applicant Address: Computerlaan 15 NL-2628 XD Delft NL
- Assignee: MAPPER LITHOGRAPHY IP B.V.,WIELAND, Marco Jan-Jaco,VAN DE PEUT, Teunis,VAN DER WILT, Floris Pepijn,HABEKOTTE, Ernst
- Current Assignee: MAPPER LITHOGRAPHY IP B.V.,WIELAND, Marco Jan-Jaco,VAN DE PEUT, Teunis,VAN DER WILT, Floris Pepijn,HABEKOTTE, Ernst
- Current Assignee Address: Computerlaan 15 NL-2628 XD Delft NL
- Agency: MOOIJ, Maarten et al.
- Priority: US61/552,479 20111028; US61/414,775 20101117; US61/413,396 20101113
- Main IPC: H01J37/22
- IPC: H01J37/22 ; H01J37/244 ; H01J37/317 ; H01J37/04 ; H01J37/304 ; B82Y10/00
Abstract:
A maskless lithography system for exposing a target (121) according to pattern data (202). The system comprises an electron optical column (102) for generating a plurality of charged particle beamlets (132, 133) for exposing the target, the electron optical column including a beamlet blanker array (117) for modulating the beamlets, the beamlet blanker array including a plurality of receivers (150) for receiving beamlet data signals and a plurality of beamlet blanker elements (152) for modulating the beamlets in accordance with the data signals. The also comprises a data path (101) comprising a preprocessing system (140) for storing and processing the pattern data and a plurality of transmission channels (240) for transmitting the processed pattern data from the preprocessing system to the beamlet blanker elements. The data path further comprises a pattern streaming system (230) for receiving the pattern data and generating beamlet data signals, and first and second channel selectors (220, 320) connecting a subset of selected transmission channels among the transmission channels for transmitting the pattern data, wherein the first channel selector (220) is connected between the preprocessing system and the transmission channels and the second channel selector (320) is connected between the channels and the beamlet blanker elements.
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