发明申请
- 专利标题： FORMULATIONS FOR THE REMOVAL OF PARTICLES GENERATED BY CERIUM- CONTAINING SOLUTIONS
- 专利标题（中）： 用于除去含有溶液的颗粒的配方
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申请号： PCT/US2012/021069申请日： 2012-01-12
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公开(公告)号： WO2012097143A2公开(公告)日： 2012-07-19
- 发明人: COOPER, Emanuel I. , BARNES, Jeffrey A.
- 申请人： ADVANCED TECHNOLOGY MATERIALS, INC. , COOPER, Emanuel I. , BARNES, Jeffrey A.
- 申请人地址： 7 Commerce Drive Danbury, Connecticut 06810 US
- 专利权人： ADVANCED TECHNOLOGY MATERIALS, INC.,COOPER, Emanuel I.,BARNES, Jeffrey A.
- 当前专利权人： ADVANCED TECHNOLOGY MATERIALS, INC.,COOPER, Emanuel I.,BARNES, Jeffrey A.
- 当前专利权人地址： 7 Commerce Drive Danbury, Connecticut 06810 US
- 代理机构： FUIERER, Tristan
- 优先权： US61/432,370 20110113
- 主分类号： H01L21/302
- IPC分类号： H01L21/302 ; H01L21/265
摘要：
Compositions and methods for removing lanthanoid-containing solids and/or species from the surface of a microelectronic device or microelectronic device fabrication hardware. Preferably, the lanthanoidcontaining solids and/or species comprise cerium. The composition is preferably substantially devoid of fluoride ions.
IPC分类:
