Invention Application
- Patent Title: FERROELECTRIC MEMORY DEVICE AND MANUFACTURING METHOD THEREOF
- Patent Title (中): 电磁存储器件及其制造方法
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Application No.: PCT/EP2013/001855Application Date: 2013-06-25
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Publication No.: WO2014000880A1Publication Date: 2014-01-03
- Inventor: FRANTTI, Johannes , FUJIOKA, Yukari
- Applicant: FRANTTI, Johannes , FUJIOKA, Yukari
- Applicant Address: Messipojankuja 6 C 49 FIN-Helsinki 00180 FI
- Assignee: FRANTTI, Johannes,FUJIOKA, Yukari
- Current Assignee: FRANTTI, Johannes,FUJIOKA, Yukari
- Current Assignee Address: Messipojankuja 6 C 49 FIN-Helsinki 00180 FI
- Agency: NORRIS, Timothy Sweyn
- Priority: GB1211267.8 20120625
- Main IPC: H01L27/115
- IPC: H01L27/115 ; C23C14/08 ; C23C16/40 ; G11C11/56 ; H01L21/02 ; H01L49/02 ; G11C11/22
Abstract:
A memory device (700) for storing data includes at least one memory cell, and wherein the at least one memory cell includes at least one ferroelectric element (710) therein for storing data therein by way of one or more polarization directions of the at least ferroelectric element. The at least one ferroelectric element is fabricated comprises a ferroelectric material having a plurality of co¬ existing phases. Optionally, the at least one ferroelectric element is fabricated from Lead Zirconate Titanate material whose composition corresponds to a morphotropic phase boundary composition. More optionally, the Lead Zirconate Titanate material has a composition Pb(Zr x Ti1- x )O 3 , wherein a parameter x is in a range of 0.52 to 0.56. The at least one ferroelectric element is provided with an electrode arrangement (720) which enables the at least one ferroelectric element to store a plurality of bits of data.
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