Invention Application
WO2014161231A1 METHOD FOR FORMING SEMICONDUCTOR GATE STRUCTURE AND SEMICONDUCTOR GATE STRUCTURE 审中-公开
形成半导体结构和半导体结构的方法

METHOD FOR FORMING SEMICONDUCTOR GATE STRUCTURE AND SEMICONDUCTOR GATE STRUCTURE
Abstract:
A method for forming a semiconductor gate structure and a semiconductor gate structure are provided. The method comprises: providing a substrate with a Ge layer as a surface thereof; forming a Sn layer on the Ge layer, in which an interface between the Ge layer and the Sn layer is a GeSn layer; removing the Sn layer to expose the GeSn layer; forming a GeSnO x passivation layer by performing an oxidation treatment for the GeSn layer, or forming a GeSnN or GeSnON passivation layer by performing a passivation treatment for the GeSn layer; and forming a gate stack on the GeSnO x , GeSnN or GeSnON passivation layer.
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