Invention Application
- Patent Title: METHOD FOR FORMING SEMICONDUCTOR GATE STRUCTURE AND SEMICONDUCTOR GATE STRUCTURE
- Patent Title (中): 形成半导体结构和半导体结构的方法
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Application No.: PCT/CN2013/077256Application Date: 2013-06-14
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Publication No.: WO2014161231A1Publication Date: 2014-10-09
- Inventor: ZHAO, Mei , LIANG, Renrong , WANG, Jing , XU, Jun
- Applicant: TSINGHUA UNIVERSITY
- Applicant Address: Qinghuayuan, Haidian District Beijing 100084 CN
- Assignee: TSINGHUA UNIVERSITY
- Current Assignee: TSINGHUA UNIVERSITY
- Current Assignee Address: Qinghuayuan, Haidian District Beijing 100084 CN
- Agency: TSINGYIHUA INTELLECTUAL PROPERTY LLC
- Priority: CN201310111607.2 20130401; CN201310111662.1 20130401
- Main IPC: H01L21/28
- IPC: H01L21/28
Abstract:
A method for forming a semiconductor gate structure and a semiconductor gate structure are provided. The method comprises: providing a substrate with a Ge layer as a surface thereof; forming a Sn layer on the Ge layer, in which an interface between the Ge layer and the Sn layer is a GeSn layer; removing the Sn layer to expose the GeSn layer; forming a GeSnO x passivation layer by performing an oxidation treatment for the GeSn layer, or forming a GeSnN or GeSnON passivation layer by performing a passivation treatment for the GeSn layer; and forming a gate stack on the GeSnO x , GeSnN or GeSnON passivation layer.
Information query
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